Abstract
This paper presents a 65 nm CMOS technology that achieves a logic density of 900 k-gates/ mm 2 and a SRAM memory density of 1.4 Mb/mm 2 using a sub-0.49 um 2 bitcell. Key features of a low cost technology option for mobile products (MP) and a high performance technology option (HP) for DSP based applications are described.
Original language | English |
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Pages (from-to) | 665-668 |
Number of pages | 4 |
Journal | Technical Digest - International Electron Devices Meeting, IEDM |
State | Published - 2004 |
Event | IEEE International Electron Devices Meeting, 2004 IEDM - San Francisco, CA, United States Duration: 13 Dec 2004 → 15 Dec 2004 |
Bibliographical note
Funding Information:The authors are grateful for contributions from Drs. Bob Eklund, Urning Ko, Venu Menon, and Dennis Buss, the SiTD/KFAB process teams, the SiTD RET team, and the SPICE modeling lab.