A 65 nm CMOS technology for mobile and digital signal processing applications

A. Chatterjee*, J. Yoon, S. Zhao, S. Tang, K. Sadra, S. Crank, H. Mogul, R. Aggarwal, B. Chatterjee, S. Lytle, C. T. Lin, K. D. Lee, J. Kim, Q. Z. Hong, T. Kim, L. Olsen, M. Quevedo-Lopez, K. Kirmse, G. Zhang, C. MeekD. Aldrich, H. Mair, M. Mehrotra, L. Adam, D. Mosher, J. Y. Yang, D. Crenshaw, B. Williams, J. Jacobs, M. Jain, J. Rosal, T. Houston, J. Wu, N. S. Nagaraj, D. Scott, S. Ashburn, A. Tsao

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

28 Scopus citations

Abstract

This paper presents a 65 nm CMOS technology that achieves a logic density of 900 k-gates/ mm 2 and a SRAM memory density of 1.4 Mb/mm 2 using a sub-0.49 um 2 bitcell. Key features of a low cost technology option for mobile products (MP) and a high performance technology option (HP) for DSP based applications are described.

Original languageEnglish
Pages (from-to)665-668
Number of pages4
JournalTechnical Digest - International Electron Devices Meeting, IEDM
StatePublished - 2004
EventIEEE International Electron Devices Meeting, 2004 IEDM - San Francisco, CA, United States
Duration: 13 Dec 200415 Dec 2004

Bibliographical note

Funding Information:
The authors are grateful for contributions from Drs. Bob Eklund, Urning Ko, Venu Menon, and Dennis Buss, the SiTD/KFAB process teams, the SiTD RET team, and the SPICE modeling lab.

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