A computational model for the hot-filament chemical vapour deposition process to produce diamond films

M. Olivas-Martínez; M. Pérez-Tello; R. Cabanillas-López; O. Contreras-López; G. Soto-Herrera; F. Castillón-Barraza

doi:10.1088/0965-0393/15/3/004

A computational model for the hot-filament chemical vapour deposition process to produce diamond films

M. Olivas-Martínez, M. Pérez-Tello, R. Cabanillas-López, O. Contreras-López, G. Soto-Herrera, F. Castillón-Barraza

Research output: Contribution to journal › Article › peer-review

Original language	American English
Pages (from-to)	237-261
Number of pages	25
Journal	Modelling and Simulation in Materials Science and Engineering
DOIs	https://doi.org/10.1088/0965-0393/15/3/004
State	Published - 1 Apr 2007

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title = "A computational model for the hot-filament chemical vapour deposition process to produce diamond films",

author = "M. Olivas-Mart{\'i}nez and M. P{\'e}rez-Tello and R. Cabanillas-L{\'o}pez and O. Contreras-L{\'o}pez and G. Soto-Herrera and F. Castill{\'o}n-Barraza",

year = "2007",

month = apr,

day = "1",

doi = "10.1088/0965-0393/15/3/004",

language = "American English",

pages = "237--261",

journal = "Modelling and Simulation in Materials Science and Engineering",

issn = "0965-0393",

publisher = "IOP Publishing Ltd.",

}

A computational model for the hot-filament chemical vapour deposition process to produce diamond films. / Olivas-Martínez, M.; Pérez-Tello, M.; Cabanillas-López, R.; Contreras-López, O.; Soto-Herrera, G.; Castillón-Barraza, F.

In: Modelling and Simulation in Materials Science and Engineering, 01.04.2007, p. 237-261.

Research output: Contribution to journal › Article › peer-review

TY - JOUR

T1 - A computational model for the hot-filament chemical vapour deposition process to produce diamond films

AU - Olivas-Martínez, M.

AU - Pérez-Tello, M.

AU - Cabanillas-López, R.

AU - Contreras-López, O.

AU - Soto-Herrera, G.

AU - Castillón-Barraza, F.

PY - 2007/4/1

Y1 - 2007/4/1

U2 - 10.1088/0965-0393/15/3/004

DO - 10.1088/0965-0393/15/3/004

M3 - Article

SP - 237

EP - 261

JO - Modelling and Simulation in Materials Science and Engineering

JF - Modelling and Simulation in Materials Science and Engineering

SN - 0965-0393

ER -