A New Integration-Based Procedure to Extract the Threshold Voltage, the Mobility Enhancement Factor, and the Series Resistance of Thin-Film MOSFETs

Rodolfo Rodriguez-Davila, Adelmo Ortiz-Conde*, Carlos Avila-Avendano, Manuel A. Quevedo-Lopez

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

14 Scopus citations

Abstract

A method is presented to extract the series resistance, the threshold voltage, and the mobility enhancement factor of thin-film MOSFETs. This integration-based method, which only requires measuring the saturation drain current from a single test device, was tested using simulated and measured data of three different devices: amorphous indium-gallium-zinc oxide (IGZO), zinc oxide (ZnO), and polysilicon thin-film transistors (TFTs).

Original languageEnglish
Article number8713512
Pages (from-to)2979-2985
Number of pages7
JournalIEEE Transactions on Electron Devices
Volume66
Issue number7
DOIs
StatePublished - Jul 2019
Externally publishedYes

Bibliographical note

Publisher Copyright:
© 1963-2012 IEEE.

Keywords

  • MOSFET
  • Mobility enhancement factor
  • parameter extraction
  • parasitic series resistance
  • thin-film transistors (TFTs)
  • threshold voltage

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