Abstract
A method is presented to extract the series resistance, the threshold voltage, and the mobility enhancement factor of thin-film MOSFETs. This integration-based method, which only requires measuring the saturation drain current from a single test device, was tested using simulated and measured data of three different devices: amorphous indium-gallium-zinc oxide (IGZO), zinc oxide (ZnO), and polysilicon thin-film transistors (TFTs).
Original language | English |
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Article number | 8713512 |
Pages (from-to) | 2979-2985 |
Number of pages | 7 |
Journal | IEEE Transactions on Electron Devices |
Volume | 66 |
Issue number | 7 |
DOIs | |
State | Published - Jul 2019 |
Externally published | Yes |
Bibliographical note
Publisher Copyright:© 1963-2012 IEEE.
Keywords
- MOSFET
- Mobility enhancement factor
- parameter extraction
- parasitic series resistance
- thin-film transistors (TFTs)
- threshold voltage