A self-calibration methodology for a 2D-long range motion stage

Marta Torralba; Lucía Díaz-Pérez; Margarita Valenzuela; José Albajez; José Yagüe-Fabra; Juan Aguilar

A self-calibration methodology for a 2D-long range motion stage

Marta Torralba, Lucía Díaz-Pérez, Margarita Valenzuela, José Albajez, José Yagüe-Fabra, Juan Aguilar

Departamento de Ingeniería Industrial

Research output: Contribution to conference › Paper

2 Scopus citations

Abstract

A novel 2D-nanopositioning system is on development to obtain submicrometre accuracy along 50 mm x 50 mm of working range. This article presents the proposal of a calibration procedure to assure traceability and minimise errors. Self-calibration methods become an interesting solution when working at submicrometre scale. Hence, a specific algorithm is proposed. The mathematical measurement model of the 2D-sensor arrangement of plane mirror laser interferometres is analysed and a commercial grid encoder is used as a non-calibrated artefact. The readouts from both devices integrated in a similar stage setup are registered, considering two different views of the established artefact. After analysing the results, the study demonstrates as initial approach the suitability of the self-calibration methodology for the considered problem.

Original language	American English
State	Published - 1 Jan 2016
Event	Proceedings of the 16th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2016 - Duration: 1 Jan 2016 → …

Conference

Conference	Proceedings of the 16th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2016
Period	1/01/16 → …

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Torralba, M., Díaz-Pérez, L., Valenzuela, M., Albajez, J., Yagüe-Fabra, J., & Aguilar, J. (2016). A self-calibration methodology for a 2D-long range motion stage. Paper presented at Proceedings of the 16th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2016. https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84984621704&origin=inward

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title = "A self-calibration methodology for a 2D-long range motion stage",

abstract = "A novel 2D-nanopositioning system is on development to obtain submicrometre accuracy along 50 mm x 50 mm of working range. This article presents the proposal of a calibration procedure to assure traceability and minimise errors. Self-calibration methods become an interesting solution when working at submicrometre scale. Hence, a specific algorithm is proposed. The mathematical measurement model of the 2D-sensor arrangement of plane mirror laser interferometres is analysed and a commercial grid encoder is used as a non-calibrated artefact. The readouts from both devices integrated in a similar stage setup are registered, considering two different views of the established artefact. After analysing the results, the study demonstrates as initial approach the suitability of the self-calibration methodology for the considered problem.",

author = "Marta Torralba and Luc{\'i}a D{\'i}az-P{\'e}rez and Margarita Valenzuela and Jos{\'e} Albajez and Jos{\'e} Yag{\"u}e-Fabra and Juan Aguilar",

year = "2016",

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language = "American English",

note = "Proceedings of the 16th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2016 ; Conference date: 01-01-2016",

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Torralba, M, Díaz-Pérez, L, Valenzuela, M, Albajez, J, Yagüe-Fabra, J & Aguilar, J 2016, 'A self-calibration methodology for a 2D-long range motion stage', Paper presented at Proceedings of the 16th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2016, 1/01/16. <https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84984621704&origin=inward>

TY - CONF

T1 - A self-calibration methodology for a 2D-long range motion stage

AU - Torralba, Marta

AU - Díaz-Pérez, Lucía

AU - Valenzuela, Margarita

AU - Albajez, José

AU - Yagüe-Fabra, José

AU - Aguilar, Juan

PY - 2016/1/1

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N2 - A novel 2D-nanopositioning system is on development to obtain submicrometre accuracy along 50 mm x 50 mm of working range. This article presents the proposal of a calibration procedure to assure traceability and minimise errors. Self-calibration methods become an interesting solution when working at submicrometre scale. Hence, a specific algorithm is proposed. The mathematical measurement model of the 2D-sensor arrangement of plane mirror laser interferometres is analysed and a commercial grid encoder is used as a non-calibrated artefact. The readouts from both devices integrated in a similar stage setup are registered, considering two different views of the established artefact. After analysing the results, the study demonstrates as initial approach the suitability of the self-calibration methodology for the considered problem.

AB - A novel 2D-nanopositioning system is on development to obtain submicrometre accuracy along 50 mm x 50 mm of working range. This article presents the proposal of a calibration procedure to assure traceability and minimise errors. Self-calibration methods become an interesting solution when working at submicrometre scale. Hence, a specific algorithm is proposed. The mathematical measurement model of the 2D-sensor arrangement of plane mirror laser interferometres is analysed and a commercial grid encoder is used as a non-calibrated artefact. The readouts from both devices integrated in a similar stage setup are registered, considering two different views of the established artefact. After analysing the results, the study demonstrates as initial approach the suitability of the self-calibration methodology for the considered problem.

M3 - Paper

T2 - Proceedings of the 16th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2016

Y2 - 1 January 2016

ER -

A self-calibration methodology for a 2D-long range motion stage

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