A self-calibration methodology for a 2D-long range motion stage

Marta Torralba, Lucía Díaz-Pérez, Margarita Valenzuela, José Albajez, José Yagüe-Fabra, Juan Aguilar

Research output: Contribution to conferencePaper

2 Scopus citations

Abstract

A novel 2D-nanopositioning system is on development to obtain submicrometre accuracy along 50 mm x 50 mm of working range. This article presents the proposal of a calibration procedure to assure traceability and minimise errors. Self-calibration methods become an interesting solution when working at submicrometre scale. Hence, a specific algorithm is proposed. The mathematical measurement model of the 2D-sensor arrangement of plane mirror laser interferometres is analysed and a commercial grid encoder is used as a non-calibrated artefact. The readouts from both devices integrated in a similar stage setup are registered, considering two different views of the established artefact. After analysing the results, the study demonstrates as initial approach the suitability of the self-calibration methodology for the considered problem.
Original languageAmerican English
StatePublished - 1 Jan 2016
EventProceedings of the 16th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2016 -
Duration: 1 Jan 2016 → …

Conference

ConferenceProceedings of the 16th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2016
Period1/01/16 → …

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