A three-layer and two-stage platform for positioning with nanometer resolution and submicrometer accuracy

Marta Torralba, José A. Yagüe-Fabra, José A. Albajez, Margarita Valenzuela, Raquel Acero, Juan J. Aguilar

Research output: Contribution to conferencePaper

Original languageAmerican English
Pages132-135
Number of pages4
StatePublished - 1 Jan 2014
Externally publishedYes
Event11th IMEKO TC14 Symposium on Laser Metrology for Precision Measurement and Inspection in Industry, LMPMI 2014 -
Duration: 1 Jan 2014 → …

Conference

Conference11th IMEKO TC14 Symposium on Laser Metrology for Precision Measurement and Inspection in Industry, LMPMI 2014
Period1/01/14 → …

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    Torralba, M., Yagüe-Fabra, J. A., Albajez, J. A., Valenzuela, M., Acero, R., & Aguilar, J. J. (2014). A three-layer and two-stage platform for positioning with nanometer resolution and submicrometer accuracy. 132-135. Paper presented at 11th IMEKO TC14 Symposium on Laser Metrology for Precision Measurement and Inspection in Industry, LMPMI 2014, . https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84907372462&origin=inward