A three-layer and two-stage platform for positioning with nanometer resolution and submicrometer accuracy

Marta Torralba, José A. Yagüe-Fabra, José A. Albajez, Margarita Valenzuela, Raquel Acero, Juan J. Aguilar

Research output: Contribution to conferencePaper

1 Scopus citations
Original languageAmerican English
Pages110-113
Number of pages4
StatePublished - 1 Jan 2013
Externally publishedYes
Event11th IMEKO TC14 International Symposium on Measurement and Quality Control, ISMQC 2013 -
Duration: 1 Jan 2013 → …

Conference

Conference11th IMEKO TC14 International Symposium on Measurement and Quality Control, ISMQC 2013
Period1/01/13 → …

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