Al-doped ZnO thin films deposited by confocal sputtering as electrodes in ZnO-based thin-film transistors

N. Hernandez-Como, A. Morales-Acevedo, M. Aleman, I. Mejia, M. A. Quevedo-Lopez

Research output: Contribution to journalArticlepeer-review

18 Scopus citations
Original languageAmerican English
Pages (from-to)26-31
Number of pages6
JournalMicroelectronic Engineering
DOIs
StatePublished - 25 Jan 2016
Externally publishedYes

Fingerprint Dive into the research topics of 'Al-doped ZnO thin films deposited by confocal sputtering as electrodes in ZnO-based thin-film transistors'. Together they form a unique fingerprint.

Cite this