Analysis of experimental reflection spectra from diffraction gratings using the Rayleigh theory and a rigorous method

Raúl García-Llamas; J. Félix Aguilar

doi:10.1117/12.451833

Analysis of experimental reflection spectra from diffraction gratings using the Rayleigh theory and a rigorous method

Raúl García-Llamas^*, J. Félix Aguilar

^*Corresponding author for this work

Departamento de Investigación en Física

Research output: Contribution to journal › Conference article › peer-review

Abstract

We obtain the reflection spectra of p?polarized light from metallic gratings fabricated by means of the interference technique. The gratings have constant period and heights are varied by changing the exposure time of the interference pattern on the sample. The experimental spectra show two minima due to the excitation of surface plasmons. and they are compared with the corresponding numerical results obtained with two models, the Rayleigh theory and the rigorous integral method. In order to demonstrate the validity of the Rayleigh hypothesis the amplitudes of the gratings are chosen close to the Rayleigh limit.

Original language	English
Pages (from-to)	153-160
Number of pages	8
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	4780
DOIs	https://doi.org/10.1117/12.451833
State	Published - 2002
Event	Surface Scattering and Diffraction for Advanced Metrology II - Seattle, WA, United States Duration: 9 Jul 2002 → …

Keywords

Diffraction gratings
Light scattering
Rayleigh theory

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10.1117/12.451833

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title = "Analysis of experimental reflection spectra from diffraction gratings using the Rayleigh theory and a rigorous method",

abstract = "We obtain the reflection spectra of p?polarized light from metallic gratings fabricated by means of the interference technique. The gratings have constant period and heights are varied by changing the exposure time of the interference pattern on the sample. The experimental spectra show two minima due to the excitation of surface plasmons. and they are compared with the corresponding numerical results obtained with two models, the Rayleigh theory and the rigorous integral method. In order to demonstrate the validity of the Rayleigh hypothesis the amplitudes of the gratings are chosen close to the Rayleigh limit.",

keywords = "Diffraction gratings, Light scattering, Rayleigh theory",

author = "Ra{\'u}l Garc{\'i}a-Llamas and Aguilar, {J. F{\'e}lix}",

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T1 - Analysis of experimental reflection spectra from diffraction gratings using the Rayleigh theory and a rigorous method

AU - García-Llamas, Raúl

AU - Aguilar, J. Félix

PY - 2002

Y1 - 2002

N2 - We obtain the reflection spectra of p?polarized light from metallic gratings fabricated by means of the interference technique. The gratings have constant period and heights are varied by changing the exposure time of the interference pattern on the sample. The experimental spectra show two minima due to the excitation of surface plasmons. and they are compared with the corresponding numerical results obtained with two models, the Rayleigh theory and the rigorous integral method. In order to demonstrate the validity of the Rayleigh hypothesis the amplitudes of the gratings are chosen close to the Rayleigh limit.

AB - We obtain the reflection spectra of p?polarized light from metallic gratings fabricated by means of the interference technique. The gratings have constant period and heights are varied by changing the exposure time of the interference pattern on the sample. The experimental spectra show two minima due to the excitation of surface plasmons. and they are compared with the corresponding numerical results obtained with two models, the Rayleigh theory and the rigorous integral method. In order to demonstrate the validity of the Rayleigh hypothesis the amplitudes of the gratings are chosen close to the Rayleigh limit.

KW - Diffraction gratings

KW - Light scattering

KW - Rayleigh theory

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U2 - 10.1117/12.451833

DO - 10.1117/12.451833

M3 - Artículo de la conferencia

AN - SCOPUS:0036984335

SN - 0277-786X

VL - 4780

SP - 153

EP - 160

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Surface Scattering and Diffraction for Advanced Metrology II

Y2 - 9 July 2002

ER -

Analysis of experimental reflection spectra from diffraction gratings using the Rayleigh theory and a rigorous method

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Keywords

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