Boron penetration studies from p<sup>+</sup>polycrystalline Si through HfSi<inf>x</inf>O<inf>y</inf>

M. A. Quevedo-Lopez, M. El-Bouanani, M. J. Kim, B. E. Gnade, R. M. Wallace, M. R. Visokay, A. Lifatou, M. J. Bevan, L. Colombo

Research output: Contribution to journalArticlepeer-review

47 Scopus citations
Original languageAmerican English
Pages (from-to)1074-1076
Number of pages3
JournalApplied Physics Letters
DOIs
StatePublished - 5 Aug 2002
Externally publishedYes

Fingerprint Dive into the research topics of 'Boron penetration studies from p<sup>+</sup>polycrystalline Si through HfSi<inf>x</inf>O<inf>y</inf>'. Together they form a unique fingerprint.

Cite this