Challenges for the integration of high-κ gate dielectrics

Manuel Quevedo-Lopez, Bruce E. Gnade, Robert M. Wallace

Research output: Contribution to conferencePaper

Original languageAmerican English
Pages3-11
Number of pages9
StatePublished - 1 Dec 2003
Externally publishedYes
EventProceedings - Electrochemical Society -
Duration: 1 Dec 2003 → …

Conference

ConferenceProceedings - Electrochemical Society
Period1/12/03 → …

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