Characterization of a capacitive sensor used in an indexed rotary metrology platform

A. Brau*, J. Santolaria, R. M. Gella, J. A. Albajez, J. J. Aguilar

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Nowadays, there has been an increasing use of non-contact sensors for measuring small displacements in the range of sub-micrometre and nanometre resolution in applications to fields such as nanopositioning, scanning, metrology, etc. Within this group of sensors, capacitive sensors are becoming more and more used due to their high accuracy and to the insensitivity to changes in magnetic field [1]. In the field of dimensional metrology applications, 3 capacitive sensors were used in the Triskelion ultra-precision probe to determine the X, Y and Z deflections of the probe tip of the ISARA 400 [2]. Nevertheless, as far as we know there aren't any references on the use of capacitive sensors in applications with portable coordinate measuring instruments, in particular, coordinate measuring arms or laser trackers. In this work, we present the characterization of a capacitive sensor and the use of six capacitive sensors to increase the final positioning repeatability of an indexed rotary metrology platform [3]. The purpose of this platform is to increase the final accuracy and simplification of the calibration, identification and the verification of geometrical parameters procedures of portable coordinate measuring machines (PCMM).

Original languageEnglish
Title of host publicationProceedings of the 11th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2011
EditorsP. Shore, Henny Spaan, Theresa Burke, H. Van Brussel
Publishereuspen
Pages162-165
Number of pages4
ISBN (Electronic)9780955308291
StatePublished - 2011
Externally publishedYes
Event11th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2011 - Como, Italy
Duration: 23 May 201126 May 2011

Publication series

NameProceedings of the 11th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2011
Volume1

Conference

Conference11th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2011
Country/TerritoryItaly
CityComo
Period23/05/1126/05/11

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