Characterizing high-k and low-k dielectric materials for semiconductors: Progress and challenges

J. Bennett, M. Quevedo-Lopez, S. Satyanarayana

Research output: Contribution to journalArticlepeer-review

6 Scopus citations
Original languageAmerican English
Pages (from-to)7167-7171
Number of pages5
JournalApplied Surface Science
DOIs
StatePublished - 30 Jul 2006
Externally publishedYes

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