Computational modeling of a CVD reactor to produce diamond films

Research output: Contribution to conferencePaperResearchpeer-review

Original languageAmerican English
Pages405-416
Number of pages12
StatePublished - 1 Dec 2006
Event2006 TMS Fall Extraction and Processing Division: Sohn International Symposium -
Duration: 1 Dec 2006 → …

Conference

Conference2006 TMS Fall Extraction and Processing Division: Sohn International Symposium
Period1/12/06 → …

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diamond films
filaments
reactors
vapor deposition
vapor phases
design optimization
chambers
kinetic energy
dissociation
computer programs
formulations
optimization
kinetics
hydrogen
profiles
predictions
temperature

Cite this

Olivas-Martínez, M., Pérez-Tello, M., & Cabanillas-López, R. E. (2006). Computational modeling of a CVD reactor to produce diamond films. 405-416. Paper presented at 2006 TMS Fall Extraction and Processing Division: Sohn International Symposium, .
Olivas-Martínez, Miguel ; Pérez-Tello, Manuel ; Cabanillas-López, Rafael Enrique. / Computational modeling of a CVD reactor to produce diamond films. Paper presented at 2006 TMS Fall Extraction and Processing Division: Sohn International Symposium, .12 p.
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title = "Computational modeling of a CVD reactor to produce diamond films",
author = "Miguel Olivas-Mart{\'i}nez and Manuel P{\'e}rez-Tello and Cabanillas-L{\'o}pez, {Rafael Enrique}",
year = "2006",
month = "12",
day = "1",
language = "American English",
pages = "405--416",
note = "2006 TMS Fall Extraction and Processing Division: Sohn International Symposium ; Conference date: 01-12-2006",

}

Olivas-Martínez, M, Pérez-Tello, M & Cabanillas-López, RE 2006, 'Computational modeling of a CVD reactor to produce diamond films' Paper presented at 2006 TMS Fall Extraction and Processing Division: Sohn International Symposium, 1/12/06, pp. 405-416.

Computational modeling of a CVD reactor to produce diamond films. / Olivas-Martínez, Miguel; Pérez-Tello, Manuel; Cabanillas-López, Rafael Enrique.

2006. 405-416 Paper presented at 2006 TMS Fall Extraction and Processing Division: Sohn International Symposium, .

Research output: Contribution to conferencePaperResearchpeer-review

TY - CONF

T1 - Computational modeling of a CVD reactor to produce diamond films

AU - Olivas-Martínez, Miguel

AU - Pérez-Tello, Manuel

AU - Cabanillas-López, Rafael Enrique

PY - 2006/12/1

Y1 - 2006/12/1

M3 - Paper

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Olivas-Martínez M, Pérez-Tello M, Cabanillas-López RE. Computational modeling of a CVD reactor to produce diamond films. 2006. Paper presented at 2006 TMS Fall Extraction and Processing Division: Sohn International Symposium, .