Deposition and Structural Characterization of Mg-Zn Co-doped GaN Films Deposited by Radio-Frequency Magnetron Sputtering in N2-Ar Evironment

Rafael Garcia

doi:10.3390/cryst14070618

Deposition and Structural Characterization of Mg-Zn Co-doped GaN Films Deposited by Radio-Frequency Magnetron Sputtering in N2-Ar Evironment

Departamento de Investigación en Física

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	1 -10
Number of pages	10
Journal	Crystals
Volume	14
Issue number	618
DOIs	https://doi.org/10.3390/cryst14070618
State	Published - 4 Jul 2024

Access to Document

10.3390/cryst14070618

Cite this

@article{b18a77ef19bc433ba6631371f9139791,

title = "Deposition and Structural Characterization of Mg-Zn Co-doped GaN Films Deposited by Radio-Frequency Magnetron Sputtering in N2-Ar Evironment",

author = "Rafael Garcia",

year = "2024",

month = jul,

day = "4",

doi = "10.3390/cryst14070618",

language = "Ingl{\'e}s",

volume = "14",

pages = "1 --10",

journal = "Crystals",

issn = "2073-4352",

publisher = "Multidisciplinary Digital Publishing Institute (MDPI)",

number = "618",

}