Original language | American English |
---|---|
Pages (from-to) | 361-363 |
Number of pages | 3 |
Journal | Electrochemical and Solid-State Letters |
DOIs | |
State | Published - 6 Nov 2006 |
Externally published | Yes |
Deposition method-induced stress effect on ultrathin titanium nitride etch characteristics
M. M. Hussain, M. A. Quevedo-Lopez, H. N. Alshareef, D. Larison, K. Mathur, B. E. Gnade
Research output: Contribution to journal › Article › peer-review
5
Scopus
citations