Deposition method-induced stress effect on ultrathin titanium nitride etch characteristics

M. M. Hussain, M. A. Quevedo-Lopez, H. N. Alshareef, D. Larison, K. Mathur, B. E. Gnade

Research output: Contribution to journalArticle

5 Scopus citations
Original languageAmerican English
Pages (from-to)361-363
Number of pages3
JournalElectrochemical and Solid-State Letters
DOIs
StatePublished - 6 Nov 2006
Externally publishedYes

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