Design of spectrometers and ended-ended systems

A. G. Rojas-Hernandez; A. Vera-Marquina; D. Berman-Mendoza; A. Garcia-Juarez

doi:10.1117/12.847793

Design of spectrometers and ended-ended systems

A. G. Rojas-Hernandez, A. Vera-Marquina, D. Berman-Mendoza, A. Garcia-Juarez

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

Optical microspectrometers have huge potential for application in industry, science, medicine, agriculture and biology. The actuallity is towards fully integrated optical microsystems. Complete silicon IC compatible MEMS-based optoelectrical microsystems on a single chip. This systems however, impose limitations. The required process compatibility and limited choice of acceptable materials does not necessarily give high optimal optical performance. This work study the best characteristics of micromirrors fabricated with anisotropic etching and used in spectrophotometers and endedended systems. The trends, the potential, the limitations and approaches to obtain a sufficient optical performance, in terms of spectral resolution and throughput, for serving the majority of applications.

Original language	English
Title of host publication	MOEMS and Miniaturized Systems IX
DOIs	https://doi.org/10.1117/12.847793
State	Published - 2010
Event	MOEMS and Miniaturized Systems IX - San Francisco, CA, United States Duration: 25 Jan 2010 → 27 Jan 2010

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	7594
ISSN (Print)	0277-786X

Conference

Conference	MOEMS and Miniaturized Systems IX
Country/Territory	United States
City	San Francisco, CA
Period	25/01/10 → 27/01/10

Keywords

MEMs
Microspectrometers
Optoelectronic integrated circuit
Silicon bulk

Access to Document

10.1117/12.847793

Cite this

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title = "Design of spectrometers and ended-ended systems",

abstract = "Optical microspectrometers have huge potential for application in industry, science, medicine, agriculture and biology. The actuallity is towards fully integrated optical microsystems. Complete silicon IC compatible MEMS-based optoelectrical microsystems on a single chip. This systems however, impose limitations. The required process compatibility and limited choice of acceptable materials does not necessarily give high optimal optical performance. This work study the best characteristics of micromirrors fabricated with anisotropic etching and used in spectrophotometers and endedended systems. The trends, the potential, the limitations and approaches to obtain a sufficient optical performance, in terms of spectral resolution and throughput, for serving the majority of applications.",

keywords = "MEMs, Microspectrometers, Optoelectronic integrated circuit, Silicon bulk",

author = "Rojas-Hernandez, {A. G.} and A. Vera-Marquina and D. Berman-Mendoza and A. Garcia-Juarez",

year = "2010",

doi = "10.1117/12.847793",

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booktitle = "MOEMS and Miniaturized Systems IX",

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Rojas-Hernandez, AG , Vera-Marquina, A, Berman-Mendoza, D & Garcia-Juarez, A 2010, Design of spectrometers and ended-ended systems. in MOEMS and Miniaturized Systems IX., 759411, Proceedings of SPIE - The International Society for Optical Engineering, vol. 7594, MOEMS and Miniaturized Systems IX, San Francisco, CA, United States, 25/01/10. https://doi.org/10.1117/12.847793

TY - GEN

T1 - Design of spectrometers and ended-ended systems

AU - Rojas-Hernandez, A. G.

AU - Vera-Marquina, A.

AU - Berman-Mendoza, D.

AU - Garcia-Juarez, A.

PY - 2010

Y1 - 2010

N2 - Optical microspectrometers have huge potential for application in industry, science, medicine, agriculture and biology. The actuallity is towards fully integrated optical microsystems. Complete silicon IC compatible MEMS-based optoelectrical microsystems on a single chip. This systems however, impose limitations. The required process compatibility and limited choice of acceptable materials does not necessarily give high optimal optical performance. This work study the best characteristics of micromirrors fabricated with anisotropic etching and used in spectrophotometers and endedended systems. The trends, the potential, the limitations and approaches to obtain a sufficient optical performance, in terms of spectral resolution and throughput, for serving the majority of applications.

AB - Optical microspectrometers have huge potential for application in industry, science, medicine, agriculture and biology. The actuallity is towards fully integrated optical microsystems. Complete silicon IC compatible MEMS-based optoelectrical microsystems on a single chip. This systems however, impose limitations. The required process compatibility and limited choice of acceptable materials does not necessarily give high optimal optical performance. This work study the best characteristics of micromirrors fabricated with anisotropic etching and used in spectrophotometers and endedended systems. The trends, the potential, the limitations and approaches to obtain a sufficient optical performance, in terms of spectral resolution and throughput, for serving the majority of applications.

KW - MEMs

KW - Microspectrometers

KW - Optoelectronic integrated circuit

KW - Silicon bulk

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U2 - 10.1117/12.847793

DO - 10.1117/12.847793

M3 - Contribución a la conferencia

AN - SCOPUS:77951552414

SN - 9780819479907

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - MOEMS and Miniaturized Systems IX

T2 - MOEMS and Miniaturized Systems IX

Y2 - 25 January 2010 through 27 January 2010

ER -

Design of spectrometers and ended-ended systems

Abstract

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Keywords

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