Development, characterization and optimization of an ultraviolet silicon sensor

D. Berman-Mendoza*, M. Aceves-Mijares, L. R. Berriel-Valdos, J. Pedraza, A. Vera-Marquina

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

In this work the development, characterization and optimization of a silicon sensor with an extended sensing range up to UV is presented. The main characteristic of this detector is that it increases the silicon detection range to the ultraviolet region (240-400nm). Besides, the fabrication process of this detector is compatible with CMOS silicon technology which makes it cheaper than commercial UV detectors.

Original languageEnglish
Title of host publicationRIAO/OPTILAS 2007 - 6th Ibero-American Conference on Optics (RIAO) and the 9th Latin-American Meeting on Optics, Lasers and Applications (OPTILAS)
Pages725-730
Number of pages6
DOIs
StatePublished - 2008
Event6th Ibero-American Conference onOptics and 9th Latin-American Meeting on Optics, Lasers and Applications, RIAO/OPTILAS 2007 - Campinas, Sao Paulo, Brazil
Duration: 21 Oct 200726 Oct 2007

Publication series

NameAIP Conference Proceedings
Volume992
ISSN (Print)0094-243X
ISSN (Electronic)1551-7616

Conference

Conference6th Ibero-American Conference onOptics and 9th Latin-American Meeting on Optics, Lasers and Applications, RIAO/OPTILAS 2007
Country/TerritoryBrazil
CityCampinas, Sao Paulo
Period21/10/0726/10/07

Keywords

  • SRO
  • Silicon sensor
  • Ultraviolet

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