Original language | Undefined/Unknown |
---|---|
State | Published - 2009 |
Effect of flow rate, nitrogen precursor and diluent on Si2N 2O deposition by HYSYCVD
A.L. Leal-Cruz, M.I. Pech-Canul, E. Lara-Curzio, R.M. Trejo, R. Peascoe
Research output: Book/Report › Book › peer-review