@inproceedings{633d1a79a3eb4abab432d3f73a2fd0d3,
title = "Effect of flow rate, nitrogen precursor and diluent on Si2N 2O deposition by HYSYCVD",
author = "Leal-Cruz, {A. L.} and Pech-Canul, {M. I.} and E. Lara-Curzio and Trejo, {R. M.} and R. Peascoe",
year = "2009",
month = sep,
day = "21",
language = "American English",
isbn = "9780470408452",
series = "Ceramic Transactions",
pages = "35--42",
booktitle = "Effect of flow rate, nitrogen precursor and diluent on Si2N 2O deposition by HYSYCVD",
note = "Ceramic Transactions ; Conference date: 01-01-2012",
}