@conference{ad75428f45574694bcde0d65e2d78a3e,
title = "Effect of nitrogen incorporation methods on 1/f noise and mobility characteristics in HfSiON NMOSFETs",
author = "Rahman, {M. Shahriar} and Tanvir Morshed and Devireddy, {S. P.} and Quevedo-Lopez, {M. A.} and Ajit Shanware and Luigi Colombo and Zeynep {\c C}elik-Butler",
year = "2007",
month = dec,
day = "1",
doi = "10.1063/1.2759629",
language = "American English",
pages = "25--28",
note = "AIP Conference Proceedings ; Conference date: 01-12-2007",
}