Error budgeting as a tool for the design of a 2D moving platform with nanometer resolution

M. Torralba, M. Valenzuela, R. Acero, J. A. Yagüe-Fabra, J. A. Albajez, J. J. Aguilar, R. J. Hocken

Research output: Contribution to conferencePaper

3 Scopus citations
Original languageAmerican English
Pages202-205
Number of pages4
StatePublished - 1 Jan 2012
Externally publishedYes
EventProceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012 -
Duration: 1 Jan 2012 → …

Conference

ConferenceProceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012
Period1/01/12 → …

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    Torralba, M., Valenzuela, M., Acero, R., Yagüe-Fabra, J. A., Albajez, J. A., Aguilar, J. J., & Hocken, R. J. (2012). Error budgeting as a tool for the design of a 2D moving platform with nanometer resolution. 202-205. Paper presented at Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012, . https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84907373344&origin=inward