Error budgeting as a tool for the design of a 2D moving platform with nanometer resolution

M. Torralba; M. Valenzuela; R. Acero; J. A. Yagüe-Fabra; J. A. Albajez; J. J. Aguilar; R. J. Hocken

Error budgeting as a tool for the design of a 2D moving platform with nanometer resolution

M. Torralba, M. Valenzuela, R. Acero, J. A. Yagüe-Fabra, J. A. Albajez, J. J. Aguilar, R. J. Hocken

Research output: Contribution to conference › Paper

Original language	American English
Pages	202-205
Number of pages	4
State	Published - 1 Jan 2012
Externally published	Yes
Event	Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012 - Duration: 1 Jan 2012 → …

Conference

Conference	Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012
Period	1/01/12 → …

Access to Document

https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84907373344&origin=inward

Fingerprint Dive into the research topics of 'Error budgeting as a tool for the design of a 2D moving platform with nanometer resolution'. Together they form a unique fingerprint.

Cite this

Torralba, M., Valenzuela, M., Acero, R., Yagüe-Fabra, J. A., Albajez, J. A., Aguilar, J. J., & Hocken, R. J. (2012). Error budgeting as a tool for the design of a 2D moving platform with nanometer resolution. 202-205. Paper presented at Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012, . https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84907373344&origin=inward

@conference{c6ee2bde41c54d369c5122625b71be5d,

title = "Error budgeting as a tool for the design of a 2D moving platform with nanometer resolution",

author = "M. Torralba and M. Valenzuela and R. Acero and Yag{\"u}e-Fabra, {J. A.} and Albajez, {J. A.} and Aguilar, {J. J.} and Hocken, {R. J.}",

year = "2012",

month = jan,

day = "1",

language = "American English",

pages = "202--205",

note = "Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012 ; Conference date: 01-01-2012",

}

Torralba, M, Valenzuela, M, Acero, R, Yagüe-Fabra, JA, Albajez, JA, Aguilar, JJ & Hocken, RJ 2012, 'Error budgeting as a tool for the design of a 2D moving platform with nanometer resolution', Paper presented at Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012, 1/01/12 pp. 202-205. <https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84907373344&origin=inward>

Error budgeting as a tool for the design of a 2D moving platform with nanometer resolution. / Torralba, M.; Valenzuela, M.; Acero, R.; Yagüe-Fabra, J. A.; Albajez, J. A.; Aguilar, J. J.; Hocken, R. J.

2012. 202-205 Paper presented at Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012, .

Research output: Contribution to conference › Paper

TY - CONF

T1 - Error budgeting as a tool for the design of a 2D moving platform with nanometer resolution

AU - Torralba, M.

AU - Valenzuela, M.

AU - Acero, R.

AU - Yagüe-Fabra, J. A.

AU - Albajez, J. A.

AU - Aguilar, J. J.

AU - Hocken, R. J.

PY - 2012/1/1

Y1 - 2012/1/1

M3 - Paper

SP - 202

EP - 205

T2 - Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012

Y2 - 1 January 2012

ER -