Error budgeting as a tool for the design of a 2D moving platform with nanometer resolution

M. Torralba, M. Valenzuela, R. Acero, J. A. Yagüe-Fabra, J. A. Albajez, J. J. Aguilar, R. J. Hocken

Research output: Contribution to conferencePaperResearch

3 Citations (Scopus)
Original languageAmerican English
Pages202-205
Number of pages4
StatePublished - 1 Jan 2012
Externally publishedYes
EventProceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012 -
Duration: 1 Jan 2012 → …

Conference

ConferenceProceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012
Period1/01/12 → …

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Budget control
Nanotechnology
Microscopes

Cite this

Torralba, M., Valenzuela, M., Acero, R., Yagüe-Fabra, J. A., Albajez, J. A., Aguilar, J. J., & Hocken, R. J. (2012). Error budgeting as a tool for the design of a 2D moving platform with nanometer resolution. 202-205. Paper presented at Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012, .
Torralba, M. ; Valenzuela, M. ; Acero, R. ; Yagüe-Fabra, J. A. ; Albajez, J. A. ; Aguilar, J. J. ; Hocken, R. J. / Error budgeting as a tool for the design of a 2D moving platform with nanometer resolution. Paper presented at Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012, .4 p.
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author = "M. Torralba and M. Valenzuela and R. Acero and Yag{\"u}e-Fabra, {J. A.} and Albajez, {J. A.} and Aguilar, {J. J.} and Hocken, {R. J.}",
year = "2012",
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Torralba, M, Valenzuela, M, Acero, R, Yagüe-Fabra, JA, Albajez, JA, Aguilar, JJ & Hocken, RJ 2012, 'Error budgeting as a tool for the design of a 2D moving platform with nanometer resolution' Paper presented at Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012, 1/01/12, pp. 202-205.

Error budgeting as a tool for the design of a 2D moving platform with nanometer resolution. / Torralba, M.; Valenzuela, M.; Acero, R.; Yagüe-Fabra, J. A.; Albajez, J. A.; Aguilar, J. J.; Hocken, R. J.

2012. 202-205 Paper presented at Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012, .

Research output: Contribution to conferencePaperResearch

TY - CONF

T1 - Error budgeting as a tool for the design of a 2D moving platform with nanometer resolution

AU - Torralba, M.

AU - Valenzuela, M.

AU - Acero, R.

AU - Yagüe-Fabra, J. A.

AU - Albajez, J. A.

AU - Aguilar, J. J.

AU - Hocken, R. J.

PY - 2012/1/1

Y1 - 2012/1/1

M3 - Paper

SP - 202

EP - 205

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Torralba M, Valenzuela M, Acero R, Yagüe-Fabra JA, Albajez JA, Aguilar JJ et al. Error budgeting as a tool for the design of a 2D moving platform with nanometer resolution. 2012. Paper presented at Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012, .