@conference{748ad82ff8fb4651826c2a3504bad704,
title = "Exchange-diffusion reactions in HfSiON during annealing studied by Rutherford backscattering spectrometry, nuclear reaction analysis and narrow resonant nuclear reaction profiling",
author = "L. Miotti and Bastos, {K. P.} and Soares, {G. V.} and C. Driemeier and Pezzi, {R. P.} and J. Morais and Baumvol, {I. J.R.} and Rotondaro, {A. L.P.} and Visokay, {M. R.} and Chambers, {J. J.} and M. Quevedo-Lopez and L. Colombo",
year = "2004",
month = nov,
day = "8",
doi = "10.1063/1.1812814",
language = "American English",
pages = "4460--4462",
note = "Applied Physics Letters ; Conference date: 08-11-2004",
}