Exchange-diffusion reactions in HfSiON during annealing studied by Rutherford backscattering spectrometry, nuclear reaction analysis and narrow resonant nuclear reaction profiling

L. Miotti; K. P. Bastos; G. V. Soares; C. Driemeier; R. P. Pezzi; J. Morais; I. J.R. Baumvol; A. L.P. Rotondaro; M. R. Visokay; J. J. Chambers; M. Quevedo-Lopez; L. Colombo

doi:10.1063/1.1812814

Exchange-diffusion reactions in HfSiON during annealing studied by Rutherford backscattering spectrometry, nuclear reaction analysis and narrow resonant nuclear reaction profiling

L. Miotti, K. P. Bastos, G. V. Soares, C. Driemeier, R. P. Pezzi, J. Morais, I. J.R. Baumvol, A. L.P. Rotondaro, M. R. Visokay, J. J. Chambers, M. Quevedo-Lopez, L. Colombo

Research output: Contribution to conference › Paper

12 Scopus citations

Original language	American English
Pages	4460-4462
Number of pages	3
DOIs	https://doi.org/10.1063/1.1812814
State	Published - 8 Nov 2004
Externally published	Yes
Event	Applied Physics Letters - Duration: 8 Nov 2004 → …

Conference

Conference	Applied Physics Letters
Period	8/11/04 → …

Access to Document

10.1063/1.1812814

https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=10844237994&origin=inward

Fingerprint Dive into the research topics of 'Exchange-diffusion reactions in HfSiON during annealing studied by Rutherford backscattering spectrometry, nuclear reaction analysis and narrow resonant nuclear reaction profiling'. Together they form a unique fingerprint.

Cite this

Miotti, L., Bastos, K. P., Soares, G. V., Driemeier, C., Pezzi, R. P., Morais, J., Baumvol, I. J. R., Rotondaro, A. L. P., Visokay, M. R., Chambers, J. J., Quevedo-Lopez, M., & Colombo, L. (2004). Exchange-diffusion reactions in HfSiON during annealing studied by Rutherford backscattering spectrometry, nuclear reaction analysis and narrow resonant nuclear reaction profiling. 4460-4462. Paper presented at Applied Physics Letters, . https://doi.org/10.1063/1.1812814

Miotti, L. ; Bastos, K. P. ; Soares, G. V. ; Driemeier, C. ; Pezzi, R. P. ; Morais, J. ; Baumvol, I. J.R. ; Rotondaro, A. L.P. ; Visokay, M. R. ; Chambers, J. J. ; Quevedo-Lopez, M. ; Colombo, L. / Exchange-diffusion reactions in HfSiON during annealing studied by Rutherford backscattering spectrometry, nuclear reaction analysis and narrow resonant nuclear reaction profiling. Paper presented at Applied Physics Letters, .3 p.

@conference{748ad82ff8fb4651826c2a3504bad704,

title = "Exchange-diffusion reactions in HfSiON during annealing studied by Rutherford backscattering spectrometry, nuclear reaction analysis and narrow resonant nuclear reaction profiling",

author = "L. Miotti and Bastos, {K. P.} and Soares, {G. V.} and C. Driemeier and Pezzi, {R. P.} and J. Morais and Baumvol, {I. J.R.} and Rotondaro, {A. L.P.} and Visokay, {M. R.} and Chambers, {J. J.} and M. Quevedo-Lopez and L. Colombo",

year = "2004",

month = nov,

day = "8",

doi = "10.1063/1.1812814",

language = "American English",

pages = "4460--4462",

note = "Applied Physics Letters ; Conference date: 08-11-2004",

}

Miotti, L, Bastos, KP, Soares, GV, Driemeier, C, Pezzi, RP, Morais, J, Baumvol, IJR, Rotondaro, ALP, Visokay, MR, Chambers, JJ, Quevedo-Lopez, M & Colombo, L 2004, 'Exchange-diffusion reactions in HfSiON during annealing studied by Rutherford backscattering spectrometry, nuclear reaction analysis and narrow resonant nuclear reaction profiling', Paper presented at Applied Physics Letters, 8/11/04 pp. 4460-4462. https://doi.org/10.1063/1.1812814

Exchange-diffusion reactions in HfSiON during annealing studied by Rutherford backscattering spectrometry, nuclear reaction analysis and narrow resonant nuclear reaction profiling. / Miotti, L.; Bastos, K. P.; Soares, G. V.; Driemeier, C.; Pezzi, R. P.; Morais, J.; Baumvol, I. J.R.; Rotondaro, A. L.P.; Visokay, M. R.; Chambers, J. J.; Quevedo-Lopez, M.; Colombo, L.

2004. 4460-4462 Paper presented at Applied Physics Letters, .

Research output: Contribution to conference › Paper

TY - CONF

T1 - Exchange-diffusion reactions in HfSiON during annealing studied by Rutherford backscattering spectrometry, nuclear reaction analysis and narrow resonant nuclear reaction profiling

AU - Miotti, L.

AU - Bastos, K. P.

AU - Soares, G. V.

AU - Driemeier, C.

AU - Pezzi, R. P.

AU - Morais, J.

AU - Baumvol, I. J.R.

AU - Rotondaro, A. L.P.

AU - Visokay, M. R.

AU - Chambers, J. J.

AU - Quevedo-Lopez, M.

AU - Colombo, L.

PY - 2004/11/8

Y1 - 2004/11/8

U2 - 10.1063/1.1812814

DO - 10.1063/1.1812814

M3 - Paper

SP - 4460

EP - 4462

T2 - Applied Physics Letters

Y2 - 8 November 2004

ER -