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Exchange-diffusion reactions in HfSiON during annealing studied by Rutherford backscattering spectrometry, nuclear reaction analysis and narrow resonant nuclear reaction profiling

  • L. Miotti
  • , K. P. Bastos
  • , G. V. Soares
  • , C. Driemeier
  • , R. P. Pezzi
  • , J. Morais
  • , I. J.R. Baumvol
  • , A. L.P. Rotondaro*
  • , M. R. Visokay
  • , J. J. Chambers
  • , M. Quevedo-Lopez
  • , L. Colombo
    • *Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

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