Exchange-diffusion reactions in HfSiON during annealing studied by Rutherford backscattering spectrometry, nuclear reaction analysis and narrow resonant nuclear reaction profiling

L. Miotti, K. P. Bastos, G. V. Soares, C. Driemeier, R. P. Pezzi, J. Morais, I. J.R. Baumvol, A. L.P. Rotondaro*, M. R. Visokay, J. J. Chambers, M. Quevedo-Lopez, L. Colombo

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

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Physics & Astronomy