Fabrication of relaxer-based piezoelectric energy harvesters using a sacrificial poly-Si seeding layer

E. M.A. Fuentes-Fernandez, A. M. Salomon-Preciado, B. E. Gnade, M. A. Quevedo-Lopez, P. Shah, H. N. Alshareef

Research output: Contribution to journalArticle

5 Scopus citations
Original languageAmerican English
Pages (from-to)3898-3904
Number of pages7
JournalJournal of Electronic Materials
DOIs
StatePublished - 1 Jan 2014
Externally publishedYes

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