Hafnium interdiffusion studies from hafnium silicate into silicon

M. Quevedo-Lopez, M. El-Bouanani, S. Addepalli, J. L. Duggan, B. E. Gnade, R. M. Wallace, M. R. Visokay, M. Douglas, L. Colombo

Research output: Contribution to journalArticle

77 Scopus citations
Original languageAmerican English
Pages (from-to)4192-4194
Number of pages3
JournalApplied Physics Letters
DOIs
StatePublished - 17 Dec 2001
Externally publishedYes

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