Hafnium silicate formation by ultra-violet/ozone oxidation of hafnium silicide

P. Punchaipetch, G. Pant, M. Quevedo-Lopez, H. Zhang, M. El-Bouanani, M. J. Kim, R. M. Wallace, B. E. Gnade

Research output: Contribution to journalArticlepeer-review

31 Scopus citations
Original languageAmerican English
Pages (from-to)68-71
Number of pages4
JournalThin Solid Films
DOIs
StatePublished - 3 Feb 2003
Externally publishedYes

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