Hafnium silicate formation by ultra-violet/ozone oxidation of hafnium silicide

P. Punchaipetch, G. Pant, M. Quevedo-Lopez, H. Zhang, M. El-Bouanani, M. J. Kim, R. M. Wallace, B. E. Gnade

Research output: Contribution to journalArticle

31 Scopus citations
Original languageAmerican English
Pages (from-to)68-71
Number of pages4
JournalThin Solid Films
DOIs
StatePublished - 3 Feb 2003
Externally publishedYes

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    Punchaipetch, P., Pant, G., Quevedo-Lopez, M., Zhang, H., El-Bouanani, M., Kim, M. J., Wallace, R. M., & Gnade, B. E. (2003). Hafnium silicate formation by ultra-violet/ozone oxidation of hafnium silicide. Thin Solid Films, 68-71. https://doi.org/10.1016/S0040-6090(02)01306-8