High-k dielectric process development for enhanced electron mobility in high performance field effect transistors

P. D. Kirsch, J. Peterson, J. Gutt, S. Gopalan, S. Krishnan, H. J. Li, M. Quevedo-Lopez, M. Akbar, J. Barnett, N. Moumen, J. H. Sim, S. C. Song, P. Lysaght, C. Huffman, P. Majhi, M. Gardner, G. Brown, G. Bersuker, B. H. Lee

Research output: Contribution to conferencePaper

Original languageAmerican English
Pages84-93
Number of pages10
StatePublished - 1 Dec 2005
Externally publishedYes
EventProceedings - Electrochemical Society -
Duration: 1 Dec 2005 → …

Conference

ConferenceProceedings - Electrochemical Society
Period1/12/05 → …

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