High-k dielectric process development for enhanced electron mobility in high performance field effect transistors

P. D. Kirsch, J. Peterson, J. Gutt, S. Gopalan, S. Krishnan, H. J. Li, M. Quevedo-Lopez, M. Akbar, J. Barnett, N. Moumen, J. H. Sim, S. C. Song, P. Lysaght, C. Huffman, P. Majhi, M. Gardner, G. Brown, G. Bersuker, B. H. Lee

Research output: Contribution to conferencePaper

Original languageAmerican English
Pages84-93
Number of pages10
StatePublished - 1 Dec 2005
Externally publishedYes
EventProceedings - Electrochemical Society -
Duration: 1 Dec 2005 → …

Conference

ConferenceProceedings - Electrochemical Society
Period1/12/05 → …

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    Kirsch, P. D., Peterson, J., Gutt, J., Gopalan, S., Krishnan, S., Li, H. J., Quevedo-Lopez, M., Akbar, M., Barnett, J., Moumen, N., Sim, J. H., Song, S. C., Lysaght, P., Huffman, C., Majhi, P., Gardner, M., Brown, G., Bersuker, G., & Lee, B. H. (2005). High-k dielectric process development for enhanced electron mobility in high performance field effect transistors. 84-93. Paper presented at Proceedings - Electrochemical Society, . https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=33645668684&origin=inward