@conference{632f119ad48745b6843a91008238d06c,
title = "High-k dielectric process development for enhanced electron mobility in high performance field effect transistors",
author = "Kirsch, {P. D.} and J. Peterson and J. Gutt and S. Gopalan and S. Krishnan and Li, {H. J.} and M. Quevedo-Lopez and M. Akbar and J. Barnett and N. Moumen and Sim, {J. H.} and Song, {S. C.} and P. Lysaght and C. Huffman and P. Majhi and M. Gardner and G. Brown and G. Bersuker and Lee, {B. H.}",
year = "2005",
month = dec,
day = "1",
language = "American English",
pages = "84--93",
note = "Proceedings - Electrochemical Society ; Conference date: 01-12-2005",
}