High performing pMOSFETs on Si(110) for application to hybrid orientation technologies - Comparison of HfO<inf>2</inf>and HfSiON

Siddarth A. Krishnan, H. Rusty Harris, Paul D. Kirsch, Cristiano Krug, Manuel Quevedo-Lopez, Chadwin Young, Byoung Hun Lee, Rino Choi, Naser Chowdhury, Sagar Suthram, Scott Thompson, Gennadi Bersuker, Rajarao Jammy

Research output: Contribution to conferencePaper

4 Scopus citations
Original languageAmerican English
DOIs
StatePublished - 1 Dec 2006
Externally publishedYes
EventTechnical Digest - International Electron Devices Meeting, IEDM -
Duration: 1 Dec 2006 → …

Conference

ConferenceTechnical Digest - International Electron Devices Meeting, IEDM
Period1/12/06 → …

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    Krishnan, S. A., Harris, H. R., Kirsch, P. D., Krug, C., Quevedo-Lopez, M., Young, C., Lee, B. H., Choi, R., Chowdhury, N., Suthram, S., Thompson, S., Bersuker, G., & Jammy, R. (2006). High performing pMOSFETs on Si(110) for application to hybrid orientation technologies - Comparison of HfO<inf>2</inf>and HfSiON. Paper presented at Technical Digest - International Electron Devices Meeting, IEDM, . https://doi.org/10.1109/IEDM.2006.346758