Higher permittivity rare earth-doped HfO<inf>2</inf> and ZrO<inf>2</inf> dielectrics for logic and memory applications

S. Govindarajan, T. S. Böscke, P. D. Kirsch, M. A. Quevedo-Lopez, P. Sivasubramani, S. C. Song, R. W. Wallace, B. E. Gnade, P. Y. Hung, Jimmy Price, U. Schröder, S. Ramanathan, B. H. Lee, R. Jammy

Research output: Contribution to conferencePaper

2 Scopus citations
Original languageAmerican English
DOIs
StatePublished - 27 Sep 2007
EventInternational Symposium on VLSI Technology, Systems, and Applications, Proceedings -
Duration: 27 Sep 2007 → …

Conference

ConferenceInternational Symposium on VLSI Technology, Systems, and Applications, Proceedings
Period27/09/07 → …

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