Homing sensor system design for a 2D long range nanopositioning moving platform

R. Acero*, J. A. Albajez, J. A. Yagüe-Fabra, M. Torralba, M. Valenzuela, J. J. Aguilar

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

The nanotechnology field has been developing strongly in recent years and ultra-precision measuring systems are nowadays required. A new two-dimensional moving platform with 50x50 mm range of travel, nanometer resolution and sub micrometer accuracy is being designed by the authors in order to be integrated with an Atomic Force Microscope (AFM). In this work the definition, design and experimental characterization of a homing sensor system for this 2D moving platform is presented. The homing sensor system will allow the generation of an absolute 2D reference for the platform (X-Y axis and θz rotation), defining an initial cero for the measuring system, which is based on laser encoders.

Original languageEnglish
Title of host publicationAdvances in Manufacturing Systems, MESIC 2013
PublisherTrans Tech Publications Ltd
Pages57-62
Number of pages6
ISBN (Print)9783038351269
DOIs
StatePublished - 2014
Event5th International Conference of Manufacturing Engineering Society, MESIC 2013 - Zaragoza, Spain
Duration: 26 Jun 201328 Jun 2013

Publication series

NameKey Engineering Materials
Volume615
ISSN (Print)1013-9826
ISSN (Electronic)1662-9795

Conference

Conference5th International Conference of Manufacturing Engineering Society, MESIC 2013
Country/TerritorySpain
CityZaragoza
Period26/06/1328/06/13

Keywords

  • Homing sensor
  • Nanometer resolution
  • PSD
  • Positioning system

Fingerprint

Dive into the research topics of 'Homing sensor system design for a 2D long range nanopositioning moving platform'. Together they form a unique fingerprint.

Cite this