Impact of nitrogen on PBTI characteristics of HfSiON/TiN gate stacks

Siddarth A. Krishnan, Manuel Quevedo-Lopez, Hong Jyh Li, Paul Kirsch, Rino Choi, Chadwin Young, Jeff J. Peterson, Byoung Hun Lee, Gennadi Bersuker, Jack C. Lee

Research output: Contribution to conferencePaper

8 Scopus citations
Original languageAmerican English
Pages325-328
Number of pages4
DOIs
StatePublished - 1 Dec 2006
Externally publishedYes
EventIEEE International Reliability Physics Symposium Proceedings -
Duration: 1 Dec 2006 → …

Conference

ConferenceIEEE International Reliability Physics Symposium Proceedings
Period1/12/06 → …

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