Impact of nitrogen on PBTI characteristics of HfSiON/TiN gate stacks

Siddarth A. Krishnan, Manuel Quevedo-Lopez, Hong Jyh Li, Paul Kirsch, Rino Choi, Chadwin Young, Jeff J. Peterson, Byoung Hun Lee, Gennadi Bersuker, Jack C. Lee

Research output: Contribution to conferencePaper

8 Scopus citations
Original languageAmerican English
Pages325-328
Number of pages4
DOIs
StatePublished - 1 Dec 2006
Externally publishedYes
EventIEEE International Reliability Physics Symposium Proceedings -
Duration: 1 Dec 2006 → …

Conference

ConferenceIEEE International Reliability Physics Symposium Proceedings
Period1/12/06 → …

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    Krishnan, S. A., Quevedo-Lopez, M., Li, H. J., Kirsch, P., Choi, R., Young, C., Peterson, J. J., Lee, B. H., Bersuker, G., & Lee, J. C. (2006). Impact of nitrogen on PBTI characteristics of HfSiON/TiN gate stacks. 325-328. Paper presented at IEEE International Reliability Physics Symposium Proceedings, . https://doi.org/10.1109/RELPHY.2006.251237