In situ synthesis of Si<inf>3</inf>N<inf>4</inf> in the Na<inf>2</inf>SiF<inf>6</inf>-N<inf>2</inf> system via CVD: Kinetics and mechanism of solid-precursor decomposition

A. L. Leal-Cruz, M. I. Pech-Canul

Research output: Contribution to journalArticle

20 Scopus citations
Original languageAmerican English
Pages (from-to)3529-3536
Number of pages8
JournalSolid State Ionics
DOIs
StatePublished - 15 Jan 2007
Externally publishedYes

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