In situ synthesis of Si<inf>3</inf>N<inf>4</inf>from Na<inf>2</inf>SiF<inf>6</inf>as a silicon solid precursor

A. L. Leal-Cruz; M. I. Pech-Canul

doi:10.1016/j.matchemphys.2005.08.057

In situ synthesis of Si<inf>3</inf>N<inf>4</inf>from Na<inf>2</inf>SiF<inf>6</inf>as a silicon solid precursor

A. L. Leal-Cruz, M. I. Pech-Canul

Research output: Contribution to journal › Article › peer-review

24 Scopus citations

Abstract

The aim of this investigation was to synthesize Si3N4through the reaction of nitrogen with SiF4(g)produced during the thermal decomposition of sodium hexafluorosilicate (Na2SiF6) and based on an experiment design, optimize the processing conditions. The quantitative effect and the contribution of the processing parameters on the amount of Si3N4formed was determined using analysis of variance (ANOVA). Results show that particles, whiskers/fibers and coatings of α and β-Si3N4can be produced in the same reaction chamber where the silicon precursor (SiF4) is generated. The optimum conditions for maximum amount of Si3N4formed are: 60 min, 1300 °C, N2-NH3, 17 mbar, a preform of 85 SiC:15 Si (wt.%) with 50% porosity, and a compact of Na2SiF6of 25 g. The versatility for synthesizing Si3N4with a variety of morphologies through an in situ process suggests the potential of the proposed route for the economic production of Si3N4. © 2005 Elsevier B.V. All rights reserved.

Original language	American English
Pages (from-to)	27-33
Number of pages	7
Journal	Materials Chemistry and Physics
DOIs	https://doi.org/10.1016/j.matchemphys.2005.08.057
State	Published - 1 Jul 2006
Externally published	Yes

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title = "In situ synthesis of Si3N4from Na2SiF6as a silicon solid precursor",

abstract = "The aim of this investigation was to synthesize Si3N4through the reaction of nitrogen with SiF4(g)produced during the thermal decomposition of sodium hexafluorosilicate (Na2SiF6) and based on an experiment design, optimize the processing conditions. The quantitative effect and the contribution of the processing parameters on the amount of Si3N4formed was determined using analysis of variance (ANOVA). Results show that particles, whiskers/fibers and coatings of α and β-Si3N4can be produced in the same reaction chamber where the silicon precursor (SiF4) is generated. The optimum conditions for maximum amount of Si3N4formed are: 60 min, 1300 °C, N2-NH3, 17 mbar, a preform of 85 SiC:15 Si (wt.%) with 50% porosity, and a compact of Na2SiF6of 25 g. The versatility for synthesizing Si3N4with a variety of morphologies through an in situ process suggests the potential of the proposed route for the economic production of Si3N4. {\textcopyright} 2005 Elsevier B.V. All rights reserved.",

author = "Leal-Cruz, {A. L.} and Pech-Canul, {M. I.}",

year = "2006",

month = jul,

day = "1",

doi = "10.1016/j.matchemphys.2005.08.057",

language = "American English",

pages = "27--33",

journal = "Materials Chemistry and Physics",

issn = "0254-0584",

publisher = "Elsevier BV",

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TY - JOUR

T1 - In situ synthesis of Si3N4from Na2SiF6as a silicon solid precursor

AU - Leal-Cruz, A. L.

AU - Pech-Canul, M. I.

PY - 2006/7/1

Y1 - 2006/7/1

N2 - The aim of this investigation was to synthesize Si3N4through the reaction of nitrogen with SiF4(g)produced during the thermal decomposition of sodium hexafluorosilicate (Na2SiF6) and based on an experiment design, optimize the processing conditions. The quantitative effect and the contribution of the processing parameters on the amount of Si3N4formed was determined using analysis of variance (ANOVA). Results show that particles, whiskers/fibers and coatings of α and β-Si3N4can be produced in the same reaction chamber where the silicon precursor (SiF4) is generated. The optimum conditions for maximum amount of Si3N4formed are: 60 min, 1300 °C, N2-NH3, 17 mbar, a preform of 85 SiC:15 Si (wt.%) with 50% porosity, and a compact of Na2SiF6of 25 g. The versatility for synthesizing Si3N4with a variety of morphologies through an in situ process suggests the potential of the proposed route for the economic production of Si3N4. © 2005 Elsevier B.V. All rights reserved.

AB - The aim of this investigation was to synthesize Si3N4through the reaction of nitrogen with SiF4(g)produced during the thermal decomposition of sodium hexafluorosilicate (Na2SiF6) and based on an experiment design, optimize the processing conditions. The quantitative effect and the contribution of the processing parameters on the amount of Si3N4formed was determined using analysis of variance (ANOVA). Results show that particles, whiskers/fibers and coatings of α and β-Si3N4can be produced in the same reaction chamber where the silicon precursor (SiF4) is generated. The optimum conditions for maximum amount of Si3N4formed are: 60 min, 1300 °C, N2-NH3, 17 mbar, a preform of 85 SiC:15 Si (wt.%) with 50% porosity, and a compact of Na2SiF6of 25 g. The versatility for synthesizing Si3N4with a variety of morphologies through an in situ process suggests the potential of the proposed route for the economic production of Si3N4. © 2005 Elsevier B.V. All rights reserved.

U2 - 10.1016/j.matchemphys.2005.08.057

DO - 10.1016/j.matchemphys.2005.08.057

M3 - Article

SP - 27

EP - 33

JO - Materials Chemistry and Physics

JF - Materials Chemistry and Physics

SN - 0254-0584

ER -

In situ synthesis of Si<inf>3</inf>N<inf>4</inf>from Na<inf>2</inf>SiF<inf>6</inf>as a silicon solid precursor

Abstract

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