In situ synthesis of Si3N4 from Na2SiF6 as a silicon solid precursor

A. L. Leal-Cruz; M. I. Pech-Canul

doi:10.1016/j.matchemphys.2005.08.057

In situ synthesis of Si₃N₄ from Na₂SiF₆ as a silicon solid precursor

A. L. Leal-Cruz, M. I. Pech-Canul^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

25 Scopus citations

Abstract

The aim of this investigation was to synthesize Si₃N₄ through the reaction of nitrogen with SiF_4(g) produced during the thermal decomposition of sodium hexafluorosilicate (Na₂SiF₆) and based on an experiment design, optimize the processing conditions. The quantitative effect and the contribution of the processing parameters on the amount of Si₃N₄ formed was determined using analysis of variance (ANOVA). Results show that particles, whiskers/fibers and coatings of α and β-Si₃N₄ can be produced in the same reaction chamber where the silicon precursor (SiF₄) is generated. The optimum conditions for maximum amount of Si₃N₄ formed are: 60 min, 1300 °C, N₂-NH₃, 17 mbar, a preform of 85 SiC:15 Si (wt.%) with 50% porosity, and a compact of Na₂SiF₆ of 25 g. The versatility for synthesizing Si₃N₄ with a variety of morphologies through an in situ process suggests the potential of the proposed route for the economic production of Si₃N₄.

Original language	English
Pages (from-to)	27-33
Number of pages	7
Journal	Materials Chemistry and Physics
Volume	98
Issue number	1
DOIs	https://doi.org/10.1016/j.matchemphys.2005.08.057
State	Published - 1 Jul 2006
Externally published	Yes

Bibliographical note

Funding Information:
Authors gratefully acknowledge CONACyT for financial support under contract 34826-U. A.L. Leal-Cruz expresses her gratitude to CONACyT for granting a scholarship. Finally, the authors also thank Mr. Felipe Márquez Torres for his technical assistance in the microscopic analysis and the company Microabrasivos de México for supplying the SiC powders.

Keywords

Chemical vapor deposition (CVD)
Coatings
Nitrides

Access to Document

10.1016/j.matchemphys.2005.08.057

Cite this

@article{f4393db55b284f2592b85f96a0809808,

title = "In situ synthesis of Si3N4 from Na2SiF6 as a silicon solid precursor",

abstract = "The aim of this investigation was to synthesize Si3N4 through the reaction of nitrogen with SiF4(g) produced during the thermal decomposition of sodium hexafluorosilicate (Na2SiF6) and based on an experiment design, optimize the processing conditions. The quantitative effect and the contribution of the processing parameters on the amount of Si3N4 formed was determined using analysis of variance (ANOVA). Results show that particles, whiskers/fibers and coatings of α and β-Si3N4 can be produced in the same reaction chamber where the silicon precursor (SiF4) is generated. The optimum conditions for maximum amount of Si3N4 formed are: 60 min, 1300 °C, N2-NH3, 17 mbar, a preform of 85 SiC:15 Si (wt.%) with 50% porosity, and a compact of Na2SiF6 of 25 g. The versatility for synthesizing Si3N4 with a variety of morphologies through an in situ process suggests the potential of the proposed route for the economic production of Si3N4.",

keywords = "Chemical vapor deposition (CVD), Coatings, Nitrides",

author = "Leal-Cruz, {A. L.} and Pech-Canul, {M. I.}",

note = "Funding Information: Authors gratefully acknowledge CONACyT for financial support under contract 34826-U. A.L. Leal-Cruz expresses her gratitude to CONACyT for granting a scholarship. Finally, the authors also thank Mr. Felipe M{\'a}rquez Torres for his technical assistance in the microscopic analysis and the company Microabrasivos de M{\'e}xico for supplying the SiC powders.",

year = "2006",

month = jul,

day = "1",

doi = "10.1016/j.matchemphys.2005.08.057",

language = "Ingl{\'e}s",

volume = "98",

pages = "27--33",

journal = "Materials Chemistry and Physics",

issn = "0254-0584",

publisher = "Elsevier BV",

number = "1",

}

TY - JOUR

T1 - In situ synthesis of Si3N4 from Na2SiF6 as a silicon solid precursor

AU - Leal-Cruz, A. L.

AU - Pech-Canul, M. I.

N1 - Funding Information: Authors gratefully acknowledge CONACyT for financial support under contract 34826-U. A.L. Leal-Cruz expresses her gratitude to CONACyT for granting a scholarship. Finally, the authors also thank Mr. Felipe Márquez Torres for his technical assistance in the microscopic analysis and the company Microabrasivos de México for supplying the SiC powders.

PY - 2006/7/1

Y1 - 2006/7/1

N2 - The aim of this investigation was to synthesize Si3N4 through the reaction of nitrogen with SiF4(g) produced during the thermal decomposition of sodium hexafluorosilicate (Na2SiF6) and based on an experiment design, optimize the processing conditions. The quantitative effect and the contribution of the processing parameters on the amount of Si3N4 formed was determined using analysis of variance (ANOVA). Results show that particles, whiskers/fibers and coatings of α and β-Si3N4 can be produced in the same reaction chamber where the silicon precursor (SiF4) is generated. The optimum conditions for maximum amount of Si3N4 formed are: 60 min, 1300 °C, N2-NH3, 17 mbar, a preform of 85 SiC:15 Si (wt.%) with 50% porosity, and a compact of Na2SiF6 of 25 g. The versatility for synthesizing Si3N4 with a variety of morphologies through an in situ process suggests the potential of the proposed route for the economic production of Si3N4.

AB - The aim of this investigation was to synthesize Si3N4 through the reaction of nitrogen with SiF4(g) produced during the thermal decomposition of sodium hexafluorosilicate (Na2SiF6) and based on an experiment design, optimize the processing conditions. The quantitative effect and the contribution of the processing parameters on the amount of Si3N4 formed was determined using analysis of variance (ANOVA). Results show that particles, whiskers/fibers and coatings of α and β-Si3N4 can be produced in the same reaction chamber where the silicon precursor (SiF4) is generated. The optimum conditions for maximum amount of Si3N4 formed are: 60 min, 1300 °C, N2-NH3, 17 mbar, a preform of 85 SiC:15 Si (wt.%) with 50% porosity, and a compact of Na2SiF6 of 25 g. The versatility for synthesizing Si3N4 with a variety of morphologies through an in situ process suggests the potential of the proposed route for the economic production of Si3N4.

KW - Chemical vapor deposition (CVD)

KW - Coatings

KW - Nitrides

UR - http://www.scopus.com/inward/record.url?scp=33646108838&partnerID=8YFLogxK

U2 - 10.1016/j.matchemphys.2005.08.057

DO - 10.1016/j.matchemphys.2005.08.057

M3 - Artículo

SN - 0254-0584

VL - 98

SP - 27

EP - 33

JO - Materials Chemistry and Physics

JF - Materials Chemistry and Physics

IS - 1

ER -