Increasing permittivity in HfZrO thin films by surface manipulation

T. S. Böscke, P. Y. Hung, P. D. Kirsch, M. A. Quevedo-Lopez, R. Ramírez-Bon

Research output: Contribution to journalArticlepeer-review

42 Scopus citations
Original languageAmerican English
JournalApplied Physics Letters
DOIs
StatePublished - 14 Aug 2009
Externally publishedYes

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