Influence of AIN layers on the interface stability of HfO<inf>2</inf>gate dielectric stacks

Melody P. Agustin, Husam Alshareef, Manuel A. Quevedo-Lopez, Susanne Stemmer

Research output: Contribution to journalArticle

17 Scopus citations
Original languageAmerican English
JournalApplied Physics Letters
DOIs
StatePublished - 4 Aug 2006
Externally publishedYes

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