Interdiffusion studies for HfSi<inf>x</inf>O<inf>y</inf>and ZrSi<inf>x</inf>O<inf>y</inf>on Si

M. A. Quevedo-Lopez; M. El-Bouanani; B. E. Gnade; R. M. Wallace; M. R. Visokay; M. Douglas; M. J. Bevan; L. Colombo

doi:10.1063/1.1501752

Interdiffusion studies for HfSi<inf>x</inf>O<inf>y</inf>and ZrSi<inf>x</inf>O<inf>y</inf>on Si

M. A. Quevedo-Lopez, M. El-Bouanani, B. E. Gnade, R. M. Wallace, M. R. Visokay, M. Douglas, M. J. Bevan, L. Colombo

Research output: Contribution to journal › Article › peer-review

Original language	American English
Pages (from-to)	3540-3550
Number of pages	11
Journal	Journal of Applied Physics
DOIs	https://doi.org/10.1063/1.1501752
State	Published - 1 Oct 2002
Externally published	Yes

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title = "Interdiffusion studies for HfSixOyand ZrSixOyon Si",

author = "Quevedo-Lopez, {M. A.} and M. El-Bouanani and Gnade, {B. E.} and Wallace, {R. M.} and Visokay, {M. R.} and M. Douglas and Bevan, {M. J.} and L. Colombo",

year = "2002",

month = oct,

day = "1",

doi = "10.1063/1.1501752",

language = "American English",

pages = "3540--3550",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

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TY - JOUR

T1 - Interdiffusion studies for HfSixOyand ZrSixOyon Si

AU - Quevedo-Lopez, M. A.

AU - El-Bouanani, M.

AU - Gnade, B. E.

AU - Wallace, R. M.

AU - Visokay, M. R.

AU - Douglas, M.

AU - Bevan, M. J.

AU - Colombo, L.

PY - 2002/10/1

Y1 - 2002/10/1

U2 - 10.1063/1.1501752

DO - 10.1063/1.1501752

M3 - Article

SP - 3540

EP - 3550

JO - Journal of Applied Physics

JF - Journal of Applied Physics

SN - 0021-8979

ER -