Interfacial diffusion studies of Hf and Zr into Si from thermally annealed Hf and Zr silicates

M. A. Quevedo-Lopez, M. El-Bouanani, B. E. Gnade, L. Colombo, M. Bevan, M. Douglas, M. Visokay, R. M. Wallace

Research output: Contribution to journalArticle

3 Scopus citations
Original languageAmerican English
Pages (from-to)223-228
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
StatePublished - 1 Jan 2002
Externally publishedYes

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