| Original language | American English |
|---|---|
| Pages (from-to) | 55-71 |
| Number of pages | 17 |
| Journal | Measurement: Journal of the International Measurement Confederation |
| DOIs | |
| State | Published - 1 Jul 2016 |
Fingerprint
platforms
nanotechnology
Nanotechnology
Precision engineering
Measurement errors
budgets
positioning
micrometers
manipulators
Microscopes
manufacturing
microscopes
prototypes
engineering
requirements
optimization
simulation
Cite this
Torralba, M., Valenzuela, M., Yagüe-Fabra, J. A., Albajez, J. A., & Aguilar, J. J. (2016). Large range nanopositioning stage design: A three-layer and two-stage platform. Measurement: Journal of the International Measurement Confederation, 55-71. https://doi.org/10.1016/j.measurement.2016.03.075
@article{1f487ea70b694cdf800f8b1b82382adc,
title = "Large range nanopositioning stage design: A three-layer and two-stage platform",
author = "M. Torralba and M. Valenzuela and Yag{\"u}e-Fabra, {J. A.} and Albajez, {J. A.} and Aguilar, {J. J.}",
year = "2016",
month = "7",
day = "1",
doi = "10.1016/j.measurement.2016.03.075",
language = "American English",
pages = "55--71",
journal = "Measurement: Journal of the International Measurement Confederation",
issn = "0263-2241",
publisher = "Elsevier",
}
Torralba, M, Valenzuela, M, Yagüe-Fabra, JA, Albajez, JA & Aguilar, JJ 2016, 'Large range nanopositioning stage design: A three-layer and two-stage platform', Measurement: Journal of the International Measurement Confederation, pp. 55-71. https://doi.org/10.1016/j.measurement.2016.03.075
Large range nanopositioning stage design: A three-layer and two-stage platform. / Torralba, M.; Valenzuela, M.; Yagüe-Fabra, J. A.; Albajez, J. A.; Aguilar, J. J.
In: Measurement: Journal of the International Measurement Confederation, 01.07.2016, p. 55-71.Research output: Contribution to journal › Scientific review
TY - JOUR
T1 - Large range nanopositioning stage design: A three-layer and two-stage platform
AU - Torralba, M.
AU - Valenzuela, M.
AU - Yagüe-Fabra, J. A.
AU - Albajez, J. A.
AU - Aguilar, J. J.
PY - 2016/7/1
Y1 - 2016/7/1
U2 - 10.1016/j.measurement.2016.03.075
DO - 10.1016/j.measurement.2016.03.075
M3 - Scientific review
SP - 55
EP - 71
JO - Measurement: Journal of the International Measurement Confederation
JF - Measurement: Journal of the International Measurement Confederation
SN - 0263-2241
ER -
Torralba M, Valenzuela M, Yagüe-Fabra JA, Albajez JA, Aguilar JJ. Large range nanopositioning stage design: A three-layer and two-stage platform. Measurement: Journal of the International Measurement Confederation. 2016 Jul 1;55-71. https://doi.org/10.1016/j.measurement.2016.03.075