Large range nanopositioning stage design: A three-layer and two-stage platform

M. Torralba, M. Valenzuela, J. A. Yagüe-Fabra, J. A. Albajez, J. J. Aguilar

Research output: Contribution to journal › Scientific review

21 Scopus citations

Original language	American English
Pages (from-to)	55-71
Number of pages	17
Journal	Measurement: Journal of the International Measurement Confederation
DOIs	https://doi.org/10.1016/j.measurement.2016.03.075
State	Published - 1 Jul 2016

@article{1f487ea70b694cdf800f8b1b82382adc,

title = "Large range nanopositioning stage design: A three-layer and two-stage platform",

author = "M. Torralba and M. Valenzuela and Yag{\"u}e-Fabra, {J. A.} and Albajez, {J. A.} and Aguilar, {J. J.}",

year = "2016",

month = jul

day = "1",

doi = "10.1016/j.measurement.2016.03.075",

language = "American English",

pages = "55--71",

journal = "Measurement: Journal of the International Measurement Confederation",

issn = "0263-2241",

publisher = "Elsevier",

}

TY - JOUR

T1 - Large range nanopositioning stage design: A three-layer and two-stage platform

AU - Torralba, M.

AU - Valenzuela, M.

AU - Yagüe-Fabra, J. A.

AU - Albajez, J. A.

AU - Aguilar, J. J.

PY - 2016/7/1

Y1 - 2016/7/1

U2 - 10.1016/j.measurement.2016.03.075

DO - 10.1016/j.measurement.2016.03.075

M3 - Scientific review

SP - 55

EP - 71

JO - Measurement: Journal of the International Measurement Confederation

JF - Measurement: Journal of the International Measurement Confederation

SN - 0263-2241

ER -