Large range nanopositioning stage design: A three-layer and two-stage platform

M. Torralba, M. Valenzuela, J. A. Yagüe-Fabra, J. A. Albajez, J. J. Aguilar

Research output: Contribution to journalScientific review

20 Citations (Scopus)
Original languageAmerican English
Pages (from-to)55-71
Number of pages17
JournalMeasurement: Journal of the International Measurement Confederation
DOIs
StatePublished - 1 Jul 2016

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platforms
nanotechnology
Nanotechnology
Precision engineering
Measurement errors
budgets
positioning
micrometers
manipulators
Microscopes
manufacturing
microscopes
prototypes
engineering
requirements
optimization
simulation

Cite this

@article{1f487ea70b694cdf800f8b1b82382adc,
title = "Large range nanopositioning stage design: A three-layer and two-stage platform",
author = "M. Torralba and M. Valenzuela and Yag{\"u}e-Fabra, {J. A.} and Albajez, {J. A.} and Aguilar, {J. J.}",
year = "2016",
month = "7",
day = "1",
doi = "10.1016/j.measurement.2016.03.075",
language = "American English",
pages = "55--71",
journal = "Measurement: Journal of the International Measurement Confederation",
issn = "0263-2241",
publisher = "Elsevier",

}

Large range nanopositioning stage design: A three-layer and two-stage platform. / Torralba, M.; Valenzuela, M.; Yagüe-Fabra, J. A.; Albajez, J. A.; Aguilar, J. J.

In: Measurement: Journal of the International Measurement Confederation, 01.07.2016, p. 55-71.

Research output: Contribution to journalScientific review

TY - JOUR

T1 - Large range nanopositioning stage design: A three-layer and two-stage platform

AU - Torralba, M.

AU - Valenzuela, M.

AU - Yagüe-Fabra, J. A.

AU - Albajez, J. A.

AU - Aguilar, J. J.

PY - 2016/7/1

Y1 - 2016/7/1

U2 - 10.1016/j.measurement.2016.03.075

DO - 10.1016/j.measurement.2016.03.075

M3 - Scientific review

SP - 55

EP - 71

JO - Measurement: Journal of the International Measurement Confederation

JF - Measurement: Journal of the International Measurement Confederation

SN - 0263-2241

ER -