Large range nanopositioning stage design: A three-layer and two-stage platform

M. Torralba, M. Valenzuela, J. A. Yagüe-Fabra, J. A. Albajez, J. J. Aguilar

Research output: Contribution to journalScientific review

21 Scopus citations
Original languageAmerican English
Pages (from-to)55-71
Number of pages17
JournalMeasurement: Journal of the International Measurement Confederation
DOIs
StatePublished - 1 Jul 2016

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