Low-temperature deposition of hafnium silicate gate dielectrics

Prakaipetch Punchaipetch; Gaurang Pant; Manuel A. Quevedo-Lopez; C. Yao; Mohamed El-Bouanani; Moon J. Kim; Robert M. Wallace; Bruce E. Gnade

doi:10.1109/JSTQE.2004.824109

Low-temperature deposition of hafnium silicate gate dielectrics

Prakaipetch Punchaipetch, Gaurang Pant, Manuel A. Quevedo-Lopez, C. Yao, Mohamed El-Bouanani, Moon J. Kim, Robert M. Wallace, Bruce E. Gnade

Research output: Contribution to journal › Article › peer-review

14 Scopus citations

Original language	American English
Pages (from-to)	89-100
Number of pages	12
Journal	IEEE Journal on Selected Topics in Quantum Electronics
DOIs	https://doi.org/10.1109/JSTQE.2004.824109
State	Published - 1 Jan 2004
Externally published	Yes

Access to Document

10.1109/JSTQE.2004.824109

https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=2442484722&origin=inward

Fingerprint Dive into the research topics of 'Low-temperature deposition of hafnium silicate gate dielectrics'. Together they form a unique fingerprint.

Cite this

@article{5d4ec5eabd374432920b9737bc3ac591,

title = "Low-temperature deposition of hafnium silicate gate dielectrics",

author = "Prakaipetch Punchaipetch and Gaurang Pant and Quevedo-Lopez, {Manuel A.} and C. Yao and Mohamed El-Bouanani and Kim, {Moon J.} and Wallace, {Robert M.} and Gnade, {Bruce E.}",

year = "2004",

month = jan,

day = "1",

doi = "10.1109/JSTQE.2004.824109",

language = "American English",

pages = "89--100",

journal = "IEEE Journal on Selected Topics in Quantum Electronics",

issn = "1077-260X",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

}

TY - JOUR

T1 - Low-temperature deposition of hafnium silicate gate dielectrics

AU - Punchaipetch, Prakaipetch

AU - Pant, Gaurang

AU - Quevedo-Lopez, Manuel A.

AU - Yao, C.

AU - El-Bouanani, Mohamed

AU - Kim, Moon J.

AU - Wallace, Robert M.

AU - Gnade, Bruce E.

PY - 2004/1/1

Y1 - 2004/1/1

U2 - 10.1109/JSTQE.2004.824109

DO - 10.1109/JSTQE.2004.824109

M3 - Article

SP - 89

EP - 100

JO - IEEE Journal on Selected Topics in Quantum Electronics

JF - IEEE Journal on Selected Topics in Quantum Electronics

SN - 1077-260X

ER -