Low-temperature deposition of hafnium silicate gate dielectrics

Prakaipetch Punchaipetch, Gaurang Pant, Manuel A. Quevedo-Lopez, C. Yao, Mohamed El-Bouanani, Moon J. Kim, Robert M. Wallace, Bruce E. Gnade

Research output: Contribution to journalArticle

14 Scopus citations
Original languageAmerican English
Pages (from-to)89-100
Number of pages12
JournalIEEE Journal on Selected Topics in Quantum Electronics
DOIs
StatePublished - 1 Jan 2004
Externally publishedYes

Fingerprint Dive into the research topics of 'Low-temperature deposition of hafnium silicate gate dielectrics'. Together they form a unique fingerprint.

  • Cite this