Original language | American English |
---|---|
Pages (from-to) | 89-100 |
Number of pages | 12 |
Journal | IEEE Journal on Selected Topics in Quantum Electronics |
DOIs | |
State | Published - 1 Jan 2004 |
Externally published | Yes |
Low-temperature deposition of hafnium silicate gate dielectrics
Prakaipetch Punchaipetch, Gaurang Pant, Manuel A. Quevedo-Lopez, C. Yao, Mohamed El-Bouanani, Moon J. Kim, Robert M. Wallace, Bruce E. Gnade
Research output: Contribution to journal › Article › peer-review
14
Scopus
citations