Low temperature hot filament chemical vapor deposition of Ultrananocrystalline Diamond films with tunable sheet resistance for electronic power devices

J. J. Alcantar-Peña; J. Montes; M. J. Arellano-Jimenez; J. E.Ortega Aguilar; D. Berman-Mendoza; R. García; M. J. Yacaman; O. Auciello

doi:10.1016/j.diamond.2016.09.007

Low temperature hot filament chemical vapor deposition of Ultrananocrystalline Diamond films with tunable sheet resistance for electronic power devices

J. J. Alcantar-Peña, J. Montes, M. J. Arellano-Jimenez, J. E.Ortega Aguilar, D. Berman-Mendoza, R. García, M. J. Yacaman, O. Auciello

Research output: Contribution to journal › Article

15 Scopus citations

Original language	American English
Pages (from-to)	207-213
Number of pages	7
Journal	Diamond and Related Materials
DOIs	https://doi.org/10.1016/j.diamond.2016.09.007
State	Published - 1 Oct 2016

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10.1016/j.diamond.2016.09.007

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Alcantar-Peña, J. J., Montes, J., Arellano-Jimenez, M. J., Aguilar, J. E. O., Berman-Mendoza, D., García, R., Yacaman, M. J., & Auciello, O. (2016). Low temperature hot filament chemical vapor deposition of Ultrananocrystalline Diamond films with tunable sheet resistance for electronic power devices. Diamond and Related Materials, 207-213. https://doi.org/10.1016/j.diamond.2016.09.007

@article{3358da5b5d954ecc99d601de0d6edd4c,

title = "Low temperature hot filament chemical vapor deposition of Ultrananocrystalline Diamond films with tunable sheet resistance for electronic power devices",

author = "Alcantar-Pe{\~n}a, {J. J.} and J. Montes and Arellano-Jimenez, {M. J.} and Aguilar, {J. E.Ortega} and D. Berman-Mendoza and R. Garc{\'i}a and Yacaman, {M. J.} and O. Auciello",

year = "2016",

month = oct,

day = "1",

doi = "10.1016/j.diamond.2016.09.007",

language = "American English",

pages = "207--213",

journal = "Diamond and Related Materials",

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Alcantar-Peña, JJ, Montes, J, Arellano-Jimenez, MJ, Aguilar, JEO, Berman-Mendoza, D, García, R, Yacaman, MJ & Auciello, O 2016, 'Low temperature hot filament chemical vapor deposition of Ultrananocrystalline Diamond films with tunable sheet resistance for electronic power devices', Diamond and Related Materials, pp. 207-213. https://doi.org/10.1016/j.diamond.2016.09.007

Low temperature hot filament chemical vapor deposition of Ultrananocrystalline Diamond films with tunable sheet resistance for electronic power devices. / Alcantar-Peña, J. J.; Montes, J.; Arellano-Jimenez, M. J.; Aguilar, J. E.Ortega; Berman-Mendoza, D.; García, R.; Yacaman, M. J.; Auciello, O.

In: Diamond and Related Materials, 01.10.2016, p. 207-213.

Research output: Contribution to journal › Article

TY - JOUR

T1 - Low temperature hot filament chemical vapor deposition of Ultrananocrystalline Diamond films with tunable sheet resistance for electronic power devices

AU - Alcantar-Peña, J. J.

AU - Montes, J.

AU - Arellano-Jimenez, M. J.

AU - Aguilar, J. E.Ortega

AU - Berman-Mendoza, D.

AU - García, R.

AU - Yacaman, M. J.

AU - Auciello, O.

PY - 2016/10/1

Y1 - 2016/10/1

U2 - 10.1016/j.diamond.2016.09.007

DO - 10.1016/j.diamond.2016.09.007

M3 - Article

SP - 207

EP - 213

JO - Diamond and Related Materials

JF - Diamond and Related Materials

SN - 0925-9635

ER -