Low temperature hot filament chemical vapor deposition of Ultrananocrystalline Diamond films with tunable sheet resistance for electronic power devices

J. J. Alcantar-Peña, J. Montes, M. J. Arellano-Jimenez, J. E.Ortega Aguilar, D. Berman-Mendoza, R. García, M. J. Yacaman, O. Auciello

Research output: Contribution to journalArticleResearchpeer-review

10 Citations (Scopus)
Original languageAmerican English
Pages (from-to)207-213
Number of pages7
JournalDiamond and Related Materials
DOIs
StatePublished - 1 Oct 2016

Fingerprint

Sheet resistance
Diamond films
Power electronics
diamond films
Graphite
Chemical vapor deposition
filaments
Diamond
vapor deposition
Diamonds
Substrates
Polyacetylenes
diamonds
electronics
graphite
polyacetylene
Graphene
graphene
hot surfaces
Noble Gases

Cite this

Alcantar-Peña, J. J. ; Montes, J. ; Arellano-Jimenez, M. J. ; Aguilar, J. E.Ortega ; Berman-Mendoza, D. ; García, R. ; Yacaman, M. J. ; Auciello, O. / Low temperature hot filament chemical vapor deposition of Ultrananocrystalline Diamond films with tunable sheet resistance for electronic power devices. In: Diamond and Related Materials. 2016 ; pp. 207-213.
@article{3358da5b5d954ecc99d601de0d6edd4c,
title = "Low temperature hot filament chemical vapor deposition of Ultrananocrystalline Diamond films with tunable sheet resistance for electronic power devices",
author = "Alcantar-Pe{\~n}a, {J. J.} and J. Montes and Arellano-Jimenez, {M. J.} and Aguilar, {J. E.Ortega} and D. Berman-Mendoza and R. Garc{\'i}a and Yacaman, {M. J.} and O. Auciello",
year = "2016",
month = "10",
day = "1",
doi = "10.1016/j.diamond.2016.09.007",
language = "American English",
pages = "207--213",
journal = "Diamond and Related Materials",
issn = "0925-9635",
publisher = "Elsevier BV",

}

Low temperature hot filament chemical vapor deposition of Ultrananocrystalline Diamond films with tunable sheet resistance for electronic power devices. / Alcantar-Peña, J. J.; Montes, J.; Arellano-Jimenez, M. J.; Aguilar, J. E.Ortega; Berman-Mendoza, D.; García, R.; Yacaman, M. J.; Auciello, O.

In: Diamond and Related Materials, 01.10.2016, p. 207-213.

Research output: Contribution to journalArticleResearchpeer-review

TY - JOUR

T1 - Low temperature hot filament chemical vapor deposition of Ultrananocrystalline Diamond films with tunable sheet resistance for electronic power devices

AU - Alcantar-Peña, J. J.

AU - Montes, J.

AU - Arellano-Jimenez, M. J.

AU - Aguilar, J. E.Ortega

AU - Berman-Mendoza, D.

AU - García, R.

AU - Yacaman, M. J.

AU - Auciello, O.

PY - 2016/10/1

Y1 - 2016/10/1

U2 - 10.1016/j.diamond.2016.09.007

DO - 10.1016/j.diamond.2016.09.007

M3 - Article

SP - 207

EP - 213

JO - Diamond and Related Materials

JF - Diamond and Related Materials

SN - 0925-9635

ER -