Low temperature hot filament chemical vapor deposition of Ultrananocrystalline Diamond films with tunable sheet resistance for electronic power devices

J. J. Alcantar-Peña, J. Montes, M. J. Arellano-Jimenez, J. E.Ortega Aguilar, D. Berman-Mendoza, R. García, M. J. Yacaman, O. Auciello

Research output: Contribution to journalArticle

12 Citations (Scopus)
Original languageAmerican English
Pages (from-to)207-213
Number of pages7
JournalDiamond and Related Materials
DOIs
StatePublished - 1 Oct 2016

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Sheet resistance
Diamond films
Power electronics
Graphite
Chemical vapor deposition
Diamond
Diamonds
Substrates
Polyacetylenes
Graphene
Noble Gases
Atoms
Relativity
Molecules
Dangling bonds
Argon
Chemical bonds
Inert gases
Hot Temperature
Grain boundaries

Cite this

Alcantar-Peña, J. J. ; Montes, J. ; Arellano-Jimenez, M. J. ; Aguilar, J. E.Ortega ; Berman-Mendoza, D. ; García, R. ; Yacaman, M. J. ; Auciello, O. / Low temperature hot filament chemical vapor deposition of Ultrananocrystalline Diamond films with tunable sheet resistance for electronic power devices. In: Diamond and Related Materials. 2016 ; pp. 207-213.
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author = "Alcantar-Pe{\~n}a, {J. J.} and J. Montes and Arellano-Jimenez, {M. J.} and Aguilar, {J. E.Ortega} and D. Berman-Mendoza and R. Garc{\'i}a and Yacaman, {M. J.} and O. Auciello",
year = "2016",
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Low temperature hot filament chemical vapor deposition of Ultrananocrystalline Diamond films with tunable sheet resistance for electronic power devices. / Alcantar-Peña, J. J.; Montes, J.; Arellano-Jimenez, M. J.; Aguilar, J. E.Ortega; Berman-Mendoza, D.; García, R.; Yacaman, M. J.; Auciello, O.

In: Diamond and Related Materials, 01.10.2016, p. 207-213.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Low temperature hot filament chemical vapor deposition of Ultrananocrystalline Diamond films with tunable sheet resistance for electronic power devices

AU - Alcantar-Peña, J. J.

AU - Montes, J.

AU - Arellano-Jimenez, M. J.

AU - Aguilar, J. E.Ortega

AU - Berman-Mendoza, D.

AU - García, R.

AU - Yacaman, M. J.

AU - Auciello, O.

PY - 2016/10/1

Y1 - 2016/10/1

U2 - 10.1016/j.diamond.2016.09.007

DO - 10.1016/j.diamond.2016.09.007

M3 - Article

SP - 207

EP - 213

JO - Diamond and Related Materials

JF - Diamond and Related Materials

SN - 0925-9635

ER -