Low temperature hot filament chemical vapor deposition of Ultrananocrystalline Diamond films with tunable sheet resistance for electronic power devices

J. J. Alcantar-Peña, J. Montes, M. J. Arellano-Jimenez, J. E.Ortega Aguilar, D. Berman-Mendoza, R. García, M. J. Yacaman, O. Auciello

Research output: Contribution to journalArticle

15 Scopus citations
Original languageAmerican English
Pages (from-to)207-213
Number of pages7
JournalDiamond and Related Materials
DOIs
StatePublished - 1 Oct 2016

Fingerprint Dive into the research topics of 'Low temperature hot filament chemical vapor deposition of Ultrananocrystalline Diamond films with tunable sheet resistance for electronic power devices'. Together they form a unique fingerprint.

  • Cite this