Low temperature hot filament chemical vapor deposition of Ultrananocrystalline Diamond films with tunable sheet resistance for electronic power devices
- J. J. Alcantar-Peña
- , J. Montes
- , M. J. Arellano-Jimenez
- , J. E.Ortega Aguilar
- , D. Berman-Mendoza
- , R. García
- , M. J. Yacaman
- , O. Auciello*
*Corresponding author for this work
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