Low temperature hot filament chemical vapor deposition of Ultrananocrystalline Diamond films with tunable sheet resistance for electronic power devices
J. J. Alcantar-Peña, J. Montes, M. J. Arellano-Jimenez, J. E.Ortega Aguilar, D. Berman-Mendoza, R. García, M. J. Yacaman, O. Auciello*
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