Low temperature processing of Al<inf>2</inf>O<inf>3</inf>-GPTMS-PMMA hybrid films with applications to high-performance ZnO thin-film transistors

J. Meza-Arroyo, M. G. Syamala Rao, I. Mejia, M. A. Quevedo-López, R. Ramírez-Bon

Research output: Contribution to journalArticle

3 Citations (Scopus)
Original languageAmerican English
Pages (from-to)456-461
Number of pages6
JournalApplied Surface Science
DOIs
StatePublished - 15 Feb 2019
Externally publishedYes

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Polymethyl Methacrylate
Thin film transistors
transistors
thin films
Processing
Temperature
MIM (semiconductors)
Gate dielectrics
sol-gel processes
Aluminum
Threshold voltage
Leakage currents
threshold voltage
Transparency
Sol-gel process
homogeneity
coating
surface roughness
leakage
Permittivity

Cite this

@article{01bf68f4f8a24e78971ab8080ebec4c2,
title = "Low temperature processing of Al2O3-GPTMS-PMMA hybrid films with applications to high-performance ZnO thin-film transistors",
author = "J. Meza-Arroyo and {Syamala Rao}, {M. G.} and I. Mejia and Quevedo-L{\'o}pez, {M. A.} and R. Ram{\'i}rez-Bon",
year = "2019",
month = "2",
day = "15",
doi = "10.1016/j.apsusc.2018.10.170",
language = "American English",
pages = "456--461",
journal = "Applied Surface Science",
issn = "0169-4332",
publisher = "Elsevier",

}

Low temperature processing of Al<inf>2</inf>O<inf>3</inf>-GPTMS-PMMA hybrid films with applications to high-performance ZnO thin-film transistors. / Meza-Arroyo, J.; Syamala Rao, M. G.; Mejia, I.; Quevedo-López, M. A.; Ramírez-Bon, R.

In: Applied Surface Science, 15.02.2019, p. 456-461.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Low temperature processing of Al2O3-GPTMS-PMMA hybrid films with applications to high-performance ZnO thin-film transistors

AU - Meza-Arroyo, J.

AU - Syamala Rao, M. G.

AU - Mejia, I.

AU - Quevedo-López, M. A.

AU - Ramírez-Bon, R.

PY - 2019/2/15

Y1 - 2019/2/15

U2 - 10.1016/j.apsusc.2018.10.170

DO - 10.1016/j.apsusc.2018.10.170

M3 - Article

SP - 456

EP - 461

JO - Applied Surface Science

JF - Applied Surface Science

SN - 0169-4332

ER -