Low-temperature sol-gel ZrHfO<inf>2</inf>-PMMA hybrid dielectric thin-films for metal oxide TFTs

M. G. Syamala Rao; M. A. Pacheco-Zuñiga; L. A. Garcia-Cerda; G. Gutiérrez-Heredia; J. A. Torres Ochoa; M. A. Quevedo López; R. Ramírez-Bon

doi:10.1016/j.jnoncrysol.2018.08.014

Low-temperature sol-gel ZrHfO<inf>2</inf>-PMMA hybrid dielectric thin-films for metal oxide TFTs

M. G. Syamala Rao, M. A. Pacheco-Zuñiga, L. A. Garcia-Cerda, G. Gutiérrez-Heredia, J. A. Torres Ochoa, M. A. Quevedo López, R. Ramírez-Bon

Research output: Contribution to journal › Article

7 Scopus citations

Original language	American English
Pages (from-to)	152-158
Number of pages	7
Journal	Journal of Non-Crystalline Solids
DOIs	https://doi.org/10.1016/j.jnoncrysol.2018.08.014
State	Published - 15 Dec 2018
Externally published	Yes

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10.1016/j.jnoncrysol.2018.08.014

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@article{e92b9fbe920d42cc8483c20627fe6432,

title = "Low-temperature sol-gel ZrHfO2-PMMA hybrid dielectric thin-films for metal oxide TFTs",

author = "{Syamala Rao}, {M. G.} and Pacheco-Zu{\~n}iga, {M. A.} and Garcia-Cerda, {L. A.} and G. Guti{\'e}rrez-Heredia and {Torres Ochoa}, {J. A.} and {Quevedo L{\'o}pez}, {M. A.} and R. Ram{\'i}rez-Bon",

year = "2018",

month = dec,

day = "15",

doi = "10.1016/j.jnoncrysol.2018.08.014",

language = "American English",

pages = "152--158",

journal = "Journal of Non-Crystalline Solids",

issn = "0022-3093",

publisher = "Elsevier",

}

TY - JOUR

T1 - Low-temperature sol-gel ZrHfO2-PMMA hybrid dielectric thin-films for metal oxide TFTs

AU - Syamala Rao, M. G.

AU - Pacheco-Zuñiga, M. A.

AU - Garcia-Cerda, L. A.

AU - Gutiérrez-Heredia, G.

AU - Torres Ochoa, J. A.

AU - Quevedo López, M. A.

AU - Ramírez-Bon, R.

PY - 2018/12/15

Y1 - 2018/12/15

U2 - 10.1016/j.jnoncrysol.2018.08.014

DO - 10.1016/j.jnoncrysol.2018.08.014

M3 - Article

SP - 152

EP - 158

JO - Journal of Non-Crystalline Solids

JF - Journal of Non-Crystalline Solids

SN - 0022-3093

ER -