Mathematical calibration procedure of a capacitive sensor-based indexed metrology platform

Agustín Brau Ávila, Margarita Valenzuela Galván, Victor Manuel Herrera Jimenez, Jorge Santolaria Mazo, Raquel Acero Cacho, Juan José Aguilar Martín

Research output: Contribution to journalArticle

1 Citation (Scopus)
Original languageAmerican English
Article number3
Number of pages13
JournalMeasurement Science and Technology
Volume28
Issue number3
StatePublished - 2017

Cite this

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title = "Mathematical calibration procedure of a capacitive sensor-based indexed metrology platform",
author = "{Brau {\'A}vila}, Agust{\'i}n and {Valenzuela Galv{\'a}n}, Margarita and {Herrera Jimenez}, {Victor Manuel} and {Santolaria Mazo}, Jorge and {Acero Cacho}, Raquel and {Aguilar Mart{\'i}n}, {Juan Jos{\'e}}",
year = "2017",
language = "American English",
volume = "28",
journal = "Measurement Science and Technology",
issn = "0957-0233",
publisher = "IOP Publishing Ltd.",
number = "3",

}

Mathematical calibration procedure of a capacitive sensor-based indexed metrology platform. / Brau Ávila, Agustín; Valenzuela Galván, Margarita; Herrera Jimenez, Victor Manuel; Santolaria Mazo, Jorge ; Acero Cacho, Raquel ; Aguilar Martín, Juan José .

In: Measurement Science and Technology, Vol. 28, No. 3, 3, 2017.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Mathematical calibration procedure of a capacitive sensor-based indexed metrology platform

AU - Brau Ávila, Agustín

AU - Valenzuela Galván, Margarita

AU - Herrera Jimenez, Victor Manuel

AU - Santolaria Mazo, Jorge

AU - Acero Cacho, Raquel

AU - Aguilar Martín, Juan José

PY - 2017

Y1 - 2017

M3 - Article

VL - 28

JO - Measurement Science and Technology

JF - Measurement Science and Technology

SN - 0957-0233

IS - 3

M1 - 3

ER -