Micro-structures of nanodiamonds grown on silicon by hot filament chemical vapor deposition

J. A. Montes-Gutierrez, R. Garcia-Gutierrez*, M. Barboza-Flores, R. Meléndrez, R. E. Cabanillas, O. E. Contreras, G. A. Hirata, R. Rangel-Segura

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

2 Scopus citations


A method to grow homogeneous micro-sized diamond clusters on silicon by Hot-Filament Chemical Vapor Deposition in a homemade reactor is reported in this work. Thermal decomposition of a CH4:H2 mixture gases was carried out in a horizontal quartz-tube reactor at 2200 °C filament temperature and 1000 °C substrate temperature at relative low pressure around 150 Torr depositing diamonds on silicon wafers. The diamond micro-structures are formed by nano-crystalline diamonds, they have a rounded shape and a narrow particle size distribution around a micrometer. The diamond micro-structures synthesized in this work showed a strong Raman shift signal, a peak at 1330 cm-1 typical of the diamond and a single optical trap was localized nearby 300 oC by Thermoluminescence analysis indicating that these diamond micro-structures could be a good thermoluminescent dosimeter material. Due to their excellent properties, diamonds obtained by this technique should find application in the biomedical and optoelectronic industry.

Original languageEnglish
Article number20170088
JournalInternational Journal of Chemical Reactor Engineering
Issue number6
StatePublished - 20 Dec 2017

Bibliographical note

Publisher Copyright:
© 2017 Walter de Gruyter GmbH, Berlin/Boston.


  • biosensors
  • dosimetry
  • nano-diamonds
  • thermoluminescence


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