Mobility enhancement of high-k gate stacks through reduced transient charging

P. D. Kirsch, J. H. Sim, S. C. Song, S. Krishnan, J. Peterson, H. J. Li, M. Quevedo-Lopez, C. D. Young, R. Choi, N. Moumen, P. Majhi, Q. Wang, J. G. Ekerdt, G. Bersuker, B. H. Lee

Research output: Contribution to conferencePaper

25 Scopus citations
Original languageAmerican English
Pages367-370
Number of pages4
DOIs
StatePublished - 1 Dec 2005
Externally publishedYes
EventProceedings of ESSDERC 2005: 35th European Solid-State Device Research Conference -
Duration: 1 Dec 2005 → …

Conference

ConferenceProceedings of ESSDERC 2005: 35th European Solid-State Device Research Conference
Period1/12/05 → …

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    Kirsch, P. D., Sim, J. H., Song, S. C., Krishnan, S., Peterson, J., Li, H. J., Quevedo-Lopez, M., Young, C. D., Choi, R., Moumen, N., Majhi, P., Wang, Q., Ekerdt, J. G., Bersuker, G., & Lee, B. H. (2005). Mobility enhancement of high-k gate stacks through reduced transient charging. 367-370. Paper presented at Proceedings of ESSDERC 2005: 35th European Solid-State Device Research Conference, . https://doi.org/10.1109/ESSDER.2005.1546661