Nanocrystalline and polycrystalline β-Ga₂O₃ thin films for deep ultraviolet detectors

Engineering & Materials Science

• Ultraviolet detectors 100%
• Thin films 50%
• Electric fields 14%
• Molecular beam epitaxy 11%
• Pulsed laser deposition 11%
• Magnetron sputtering 10%
• Ultraviolet radiation 10%
• Metals 9%
• Sputtering 9%
• Optical properties 9%
• Crystallinity 9%
• Single crystals 8%
• Energy gap 8%
• Structural properties 8%
• Electric properties 8%
• Diodes 7%
• Wavelength 6%
• Transistors 6%
• Detectors 6%
• Electrodes 5%
• Defects 5%
• Sensors 3%

Chemistry

• Polycrystalline Solid 48%
• Electric Field 13%
• Liquid Film 11%
• Molecular Beam Epitaxy 11%
• Pulsed Laser Deposition 10%
• Magnetron Sputtering 8%
• Sputtering 8%
• Metal 6%
• Electrical Property 6%
• Crystallinity 5%
• Band Gap 5%
• Optical Property 5%
• Single Crystalline Solid 5%
• Wavelength 5%
• Application 4%
• Behavior as Electrode 3%
• Time 2%