Nanostructured fibers of A-SI<inf>3</inf>N<inf>4</inf>deposited by HYSY-CVD

E. B. Acosta-Enriquez, M. C. Acosta-Enriquez, R. Castillo-Ortega, M. A.E. Zayas, M. I. Pech-Canul

Research output: Contribution to journalArticle

1 Citation (Scopus)
Original languageAmerican English
Pages (from-to)601-605
Number of pages5
JournalDigest Journal of Nanomaterials and Biostructures
StatePublished - 1 Apr 2016

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Hybrid systems
Chemical vapor deposition
Deposits
deposits
vapor deposition
Atmospheric Pressure
fibers
Fibers
Physics
Silicon
Fourier Transform Infrared Spectroscopy
Silicon nitride
Silicon wafers
silicon nitrides
Atmospheric pressure
Hydrogen
vibration mode
atmospheric pressure
manufacturing
wafers

Cite this

@article{63ee038e65124cb0ba45c66b9eabbc77,
title = "Nanostructured fibers of A-SI3N4deposited by HYSY-CVD",
author = "Acosta-Enriquez, {E. B.} and Acosta-Enriquez, {M. C.} and R. Castillo-Ortega and Zayas, {M. A.E.} and Pech-Canul, {M. I.}",
year = "2016",
month = "4",
day = "1",
language = "American English",
pages = "601--605",
journal = "Digest Journal of Nanomaterials and Biostructures",
issn = "1842-3582",
publisher = "National Institute R and D of Materials Physics",

}

Nanostructured fibers of A-SI<inf>3</inf>N<inf>4</inf>deposited by HYSY-CVD. / Acosta-Enriquez, E. B.; Acosta-Enriquez, M. C.; Castillo-Ortega, R.; Zayas, M. A.E.; Pech-Canul, M. I.

In: Digest Journal of Nanomaterials and Biostructures, 01.04.2016, p. 601-605.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Nanostructured fibers of A-SI3N4deposited by HYSY-CVD

AU - Acosta-Enriquez, E. B.

AU - Acosta-Enriquez, M. C.

AU - Castillo-Ortega, R.

AU - Zayas, M. A.E.

AU - Pech-Canul, M. I.

PY - 2016/4/1

Y1 - 2016/4/1

M3 - Article

SP - 601

EP - 605

JO - Digest Journal of Nanomaterials and Biostructures

JF - Digest Journal of Nanomaterials and Biostructures

SN - 1842-3582

ER -